Quantitative analysis method for monomer of photoresist binder
A technique of quantitative analysis and binder, applied in the field of quantitative analysis of monomers
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Embodiment 1
[0076] For PR adhesives containing benzyl methacrylate (BzMA), N-phenylmaleimide (N-PMI) and styrene monomers, in amounts of 0.5 mg, 1 mg, 1.5 mg and 2 mg Take 3 kinds of standard products and adhesive A samples, and then carry out the test after accurately weighing their weight to 0.1 mg unit. Using Py-GC / MS (pyrolyzer temperature: 600° C.), the area % of each monomer was measured, and the measured value was substituted into a calibration curve to normalize the value. The results are shown in Tables 9 and 10 below.
[0077] [Table 9]
[0078] Normalized results for monomers in binder A
[0079]
[0080] 1) Benzyl methacrylate, 2) N-phenylmaleimide
[0081] [Table 10]
[0082] The results of the addition ratio in adhesive A
[0083]
[0084] 1) Benzyl methacrylate, 2) N-phenylmaleimide
[0085] Based on the calibration curve showing the normalized area (%) relative to the addition ratio of monomer image 3 , Quantitative analysis was carried out on the 3 stand...
Embodiment 2
[0090] Embodiment 2 utilizes Py-GC / MS, NMR and NMR+EA method to carry out the result of quantitative analysis A total of 6 samples of linear adhesives and reactive adhesives were quantitatively analyzed in this example and the results of each analysis method are shown in Table 12 below. For binders C, D and F, it can be confirmed that the NMR method provides smaller errors than the Py-GC / MS method. For Adhesives A, B and E, it can be confirmed that the Py-GC / MS method provides smaller errors than the NMR method.
[0091] From these results, it can be seen that the Py-GC / MS method is more suitable for binders containing four or more monomers. The EA method was used to calibrate the N content in the NMR calculations (NMR+EA method).
[0092] [Table 12]
[0093] Recovery ratio and error of monomers in 6 binder samples analyzed by Py-GC / MS, NMR and NMR+EA
[0094]
[0095] 1) Benzyl methacrylate, 2) N-phenylmaleimide, 3) Lauryl methacrylate, 4) cyclohexyl methacrylate,...
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