Cycloolefin copolymer micro-lens array with metal diaphragm and preparation method thereof

Abstract

The invention discloses a cycloolefin copolymer micro-lens array with a metal diaphragm and a preparation method thereof. The preparation method comprises the following steps of step S101, forming a first photoresist mask on the surface of a silicon wafer substrate by adopting a photolithography method and using a first photolithographic mask; step S102, etching a silicon wafer micropore array onthe silicon wafer substrate; step S103, paving a cycloolefin copolymer layer on the silicon wafer micropore array, and then carrying out hot-pressing treatment to obtain a first cycloolefin copolymerarray; step S104, forming a second photoresist mask on the cycloolefin copolymer array by adopting a reverse-phase photolithography method and using a second photolithographic mask to obtain a secondcycloolefin copolymer array; step S105, evaporating a layer of metal on a structural surface of the second cycloolefin copolymer array to obtain a third cycloolefin copolymer array; and step S106, putting the third cycloolefin copolymer array into acetone liquid to obtain the cycloolefin copolymer micro-lens array with the metal diaphragm.

Description

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AI Technical Summary

Benefits of technology

This patented technique involves creating tiny holes or other structures within an optical material by melting it into liquid at room temperature before being pressed onto another solid plate called glass slide that helps cool down any remaining solvent during manufacturing. By doing this, these techniques simplify the production processes while maintaining their effectiveness over longer periods. Additionally, they use various technical means such as heat presses, compression force, gravitational forces, magnetic fields, etc., to improve the quality of the final product. Overall, this new approach simplifies the way we prepare micro-lenses arrays (MLAs) quickly and efficiently compared to traditional ways like casting them out from cathode ray tubes).

Problems solved by technology

This patents describes various technical means that have been developed during recent years for creating miniature plasma display systems called LCOS displays or MOSFETLMS displays. These devices use tiny mirror elements like silicon dioxy ceramic microspheres or polysiloxane to control their reflection characteristics. They require precise placement within specific areas where they work properly without being affected by external factors such as temperature changes or other environmental influences. Additionally, these components must be integrated together efficiently at large scales due to increasing demand over time. Current fabricating technologies involve multiple steps involving etching, deposition, machining, thermal compression bonding, injection moldings, and others requiring significant investments and equipment expenditure.

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