Displacement amplifying tuning fork type micro-mechanical gyroscope based on lever effect

Abstract

The invention, which belongs to the technical field of micromechanical systems, discloses a displacement amplifying tuning fork type micro-mechanical gyroscope based on a lever effect. Photoetching isperformed on a glass substrate and metal is sputtered, and a metal electrode is formed by stripping; a silicon wafer is bonded to glass substrate and photoetching deep etching is performed on the silicon wafer on the glass substrate to form an anchor point; and photoetching deep etching is performed on the silicon wafer to release an MEMS mechanical structure that is fully-decoupled fully-symmetric structural tuning fork structure. According to the invention, a flexible lever mechanism is arranged between the central mass block and the detection frame of the detection mode, the detection displacement of the central mass block is amplified and is transmitted to the detection frame, and the detection frame detects a capacitance change obviously. Meanwhile, secondary decoupling is realized by using the dead point effect of the lever and the decoupling property of the U-shaped force transmission beam, so that the orthogonal coupling is reduced and thus the higher sensitivity and higher resolution are realized.

Description

technical field [0001] The invention belongs to the technical field of micromechanical systems, in particular to a tuning fork micromechanical gyroscope based on lever effect displacement amplification. Background technique [0002] At present, the closest existing technology: micromachined gyroscope is an inertial sensor that measures angular velocity or angular displacement, and has achieved rapid development in the past three decades. Compared with traditional gyroscopes, micromachined gyroscopes have low cost , small size, light weight, low power consumption, mass production, easy digitization, intelligence and many other advantages. With the continuous improvement of the performance of micro-mechanical gyroscopes, micro-mechanical gyroscopes have been widely used in industrial fields such as automobile stability systems and anti-skid systems, robot attitude control, and some can be applied to small aircraft automatic control systems, radar stability control systems, Gu...

AI Technical Summary

Problems solved by technology

[0003] However, the displacement of the micromechanical gyroscope in the detection mode is very small. When detecting the rotation of 1° / s, the detection displacement is less than 1nm. Because the displacement is too small, the displacement detection is difficult and the mechanical sensitivity is low. Mechanical gyroscopes have low detection accuracy and can only achieve short-term tactical-level angle detection

[0005] The displacement of the micro-mechanical gyroscope in the detection mode is very small. When detecting the rotation of 1° / s, the detection displacement is less than 1nm. Because the displacement is too small, it is difficult to detect the displacement and the mechanical sensitivity is low, which leads to the existing micro-mechanical gyroscope. The accuracy of instrument detection is low and only short-term tactical angle detection can be realized

The accuracy and level of the current peripheral processing circuit has reached the limit, and the effect of improving the accuracy of the processing circuit is very small. Therefore, it is very important to improve the mechanical sensitivity of the micromachined gyroscope.

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