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Silicon-based metamaterial multimode bending waveguide and preparation method thereof

A technology for bending waveguides and metamaterials, applied in optical waveguides, light guides, instruments, etc., can solve problems such as mode mismatch, reduce insertion loss, overcome mode mismatch problems, and achieve good process robustness.

Active Publication Date: 2019-09-10
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a silicon-based metamaterial multimode curved waveguide and its preparation method, aiming to solve the existing modes of multimode 90-degree deflection transmission in the ultra-small size of the traditional multimode waveguide mismatch problem

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  • Silicon-based metamaterial multimode bending waveguide and preparation method thereof
  • Silicon-based metamaterial multimode bending waveguide and preparation method thereof
  • Silicon-based metamaterial multimode bending waveguide and preparation method thereof

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[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute conflicts with each other.

[0035] The invention provides a silicon-based metamaterial multimode curved waveguide, such as figure 1 As shown, including a multimode input waveguide, a multimode output waveguide, and a metamaterial waveguide between the multimode input waveguide and the multimode output waveguide;

[0036] The metamaterial waveguide is composed of N×N pixel blocks of equal size;

[0037] Wherein, N is a pos...

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Abstract

The invention discloses a silicon-based metamaterial multimode bending waveguide and a preparation method thereof. The multimode bending waveguide comprises a multimode input waveguide, a multimode output waveguide and a metamaterial waveguide, wherein both the multimode input waveguide and the multimode output waveguide can support a plurality of modes; the metamaterial waveguide consist of N*N pieces of pixel blocks with the same size; the pixel blocks are punched to form a special through hole array; and the refractive index regulation and control capability of the metamaterial waveguide ina sub-wavelength size is used for carrying out wavefront phase regulation and control. The arrangement of the through hole array of the metamaterial sub-wavelength size can be equivalent to an asymmetric Y branch structure, a high-order mode is firstly converted into a base membrane to realize extra-small-radius 90-degree deflection transmission, and is then converted into a corresponding high-order mode so as to realize the small-size multimode bending waveguide. Therefore, by use of the multimode bending waveguide, the problem of the mode mismatch of the extra-small-size bending waveguide is solved, the insertion loss of the device is reduced, and the performance of the multimode bending waveguide is improved.

Description

technical field [0001] The invention belongs to the field of integrated photonic devices, and more specifically relates to a silicon-based metamaterial multimode curved waveguide and a preparation method thereof. Background technique [0002] In recent years, with the rise and development of artificial intelligence, big data, and cloud computing, people's demand for communication capacity, bandwidth, and speed has exploded. Optical interconnection technology is the most potential way to overcome communication network transmission bottlenecks. At the same time, optical High integration of devices is becoming the general trend. Among various optical interconnection schemes, silicon-based optical interconnection technology is considered to be the most promising scheme. Silicon material has been widely used in CMOS integrated circuits, and its structural manufacturing process is mature, which can be produced on a large scale and at low cost. In recent years, key functional dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/10G02B6/12G02B1/00
CPCG02B1/002G02B6/10G02B6/12G02B2006/12035G02B2006/1209G02B2006/12119G02B2006/12166
Inventor 张敏明常卫杰刘德明
Owner HUAZHONG UNIV OF SCI & TECH
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