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High-quality factor elliptical resonator

A high-quality factor, elliptical technology, applied in the direction of electrical components, impedance networks, etc., can solve problems such as support beam loss, and achieve the effects of suppressing expansion and contraction deformation, suppressing loss, and high quality factor

Active Publication Date: 2019-08-13
XIHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems existing in the prior art, the present invention provides an elliptical resonator with a high quality factor, which solves the loss problem caused by the torsional deformation of the support beam in the prior art

Method used

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Embodiment Construction

[0033] The specific embodiments of the present invention are described below so that those skilled in the art can understand the present invention, but it should be clear that the present invention is not limited to the scope of the specific embodiments. For those of ordinary skill in the art, as long as various changes Within the spirit and scope of the present invention defined and determined by the appended claims, these changes are obvious, and all inventions and creations using the concept of the present invention are included in the protection list.

[0034] like Figure 1 to Figure 7 As shown, an elliptical resonator with a high quality factor includes: an elliptical resonator 1, a piezoelectric driver, a piezoelectric detector, a support beam, an anchor point, pins, wires and a substrate 11; the support beam includes a first The support beam 4-1 and the second support beam 4-2; the wires include the drive signal wire 9, the detection signal wire 10, the first ground si...

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Abstract

The invention discloses a high-quality factor elliptical resonator, which comprises an elliptical harmonic oscillator, a piezoelectric driver, a piezoelectric detector, a supporting beams, anchor points, pins, wires and a substrate; the supporting beams comprise the first supporting beam and the second supporting beam. The wires comprise a driving signal wire, a detection signal wire, a first grounding signal wire and a second grounding signal wire; the anchor points comprise a first anchor point and a second anchor point; the pins comprise a first grounding signal pin, a second grounding signal pin, a detection signal pin and a driving signal pin; a suspended elliptical harmonic oscillator is arranged on the top surface of the substrate, one end of a long axis of the elliptical harmonic oscillator is connected with the first anchor point through the first supporting beam, and the other end of the long axis of the elliptical harmonic oscillator is connected with the second anchor pointthrough the second supporting beam; the problem of loss caused by torsional deformation of the supporting beam in the prior art is solved.

Description

technical field [0001] The invention relates to the field of radio frequency micro-electromechanical systems, in particular to an elliptical resonator with high quality factor. Background technique [0002] Compared with traditional resonators, MEMS resonators have the advantages of high Q value, low power consumption, small size, integration, and low cost, and have broad application prospects in wireless communication systems. MEMS resonators can be mainly divided into two types: out-of-plane vibration mode and in-plane vibration mode. [0003] Among them, the disc-shaped resonator based on the out-of-plane vibration mode still has a small motion impedance at low frequencies, so it has advantages in low-frequency applications. The typical structure of this type of resonator is a disc. The support beam loss is a typical loss mechanism that limits the quality factor of a disk-shaped resonator. It is a kind of energy loss caused by the elastic wave conduction from the resonat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/24H03H9/02
CPCH03H9/2405H03H9/02433
Inventor 何江波
Owner XIHUA UNIV
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