Positive photosensitive resin composition, insulating film and image display device
A technology of photosensitive resin and composition, applied in the direction of composition, optics and opto-mechanical equipment for inhibiting chemical change, can solve the problem of failing to provide mechanical and optical properties, and achieve the purpose of preventing yellowing phenomenon and improving density. synergistic effect
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[0229] The following evaluation was performed about the photosensitive composition manufactured by the Example and the comparative example of Table 1, and the result is described in following Table 2.
[0230] (1) Sensitivity determination
[0231] On a glass substrate (Corning 1737, manufactured by Corning Corporation) with a thickness of 0.7 mm, utilize a spin coater (Spinner) to coat the photosensitive resin compositions of Examples and Comparative Examples respectively, and heat on a heating plate at 100° C. for 125 seconds The solvent was evaporated to form a pre-insulation layer with a thickness of 4.0 μm.
[0232] Thereafter, in order to obtain a contact hole pattern with a diameter of 10 μm, exposure was performed by an i-line stepper (NSR-205i11D, Nikon Corporation) using a mask having a quadrangular pattern opening with an exposed portion having a side of 10 μm.
[0233] The exposed substrate was developed with 2.38% tetramethylammonium hydroxide aqueous solution as...
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