Online self-calibration system for micro-silicon mechanical gyroscope scale factor

Abstract

The invention discloses an online self-calibration system for a micro-silicon mechanical gyroscope scale factor. The system is characterized in that an electrostatic exciting electrode does not need to be additionally added, and under a normal working situation of a gyroscope, the scale factor can be subjected to self-calibration in time. An AGC (Automatic Gain Control) circuit and a C / V driving detection interface circuit are connected to carry out close-loop driving on the gyroscope; a current signal Is is detected, and is converted into a detection voltage signal Vs through the C / V drivingdetection interface circuit; an FPGA (Field Programmable Gate Array) generates a self-calibration reference signal, through a DAC (Digital-to-Analogue Converter), digital-to-analogue conversion is carried out, and the DAC is connected to a control switch; a control signal generated in an FPGA (Field Programmable Gate Array) carries out gating on two paths of the control switch; meanwhile, the signal serves as the demodulation benchmark of a self-calibration reference signal; and gyroscope detection modality real-time frequency and driving modality real-time frequency are extracted to finish the self-calibration of the scale factor.

Description

technical field [0001] The invention belongs to the field of silicon micromechanical gyroscopes, in particular to an online self-calibration system for the scale factor of silicon micromechanical gyroscopes. Background technique [0002] A gyroscope is an inertial sensor that measures the angular velocity of a vehicle relative to inertial space. Compared with traditional gyroscopes, silicon micromachined gyroscopes are small in size, light in weight, low in power consumption and suitable for mass production, making them have broad application prospects in civilian and military fields. The performance of the domestic silicon micromachined gyroscope has been greatly improved in the research and development process of the past two decades. In the laboratory environment, the zero bias stability of the silicon micromachined gyroscope is better than 1° / h. However, its accuracy still cannot meet the requirements of independent inertial navigation. Silicon micromachined gyroscopes...

AI Technical Summary

Problems solved by technology

However, the problems of this kind of error compensation mainly include: (1) Due to the complex coupling mechanism between the silicon micromachined gyroscope and environmental factors, it is difficult to achieve efficient and accurate error compensation; (2) In the temperature and mechanical environment and long-term storage conditions Under certain circumstances, some parameters of the silicon micromachined gyroscope will change slowly, so the compensation coefficient obtained offline cannot be applied to the entire service period of the silicon micromachined gyroscope;

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