A scanning electrochemical microscope and its calibration method

Abstract

The invention discloses a scanning electrochemical microscope, comprising: a three-dimensional ball screw scanner, a three-dimensional piezoelectric scanner, a conductive probe, a conductive base, a working platform and a micro-control unit. The three-dimensional ball screw scanner includes X The adjustment axis, the Y adjustment axis and the Z adjustment axis; the X adjustment axis, the Y adjustment axis and the Z adjustment axis are arranged perpendicular to each other, the X adjustment axis is arranged on the working platform, and the three-dimensional piezoelectric scanner is arranged on the Z adjustment axis On the shaft, the scanning electrochemical microscope of this scheme integrates a ball screw scanner with high stability, a piezoelectric scanner, a conductive probe, a conductive base and a micro-control unit, and the piezoelectric scanning is performed by the ball screw scanner. The scanning range and linearity of the detector are corrected, avoiding the use of precision distance testing instruments or standard samples, and has the advantages of simple operation and low cost.

Description

technical field [0001] The invention relates to the technical field of scanning conductive probe microscopes, in particular to a scanning electrochemical microscope and a calibration method thereof. Background technique [0002] Scanning Probe Microscope (SPM) is a general term for a series of microscopes, including scanning tunneling microscope (STM), atomic force microscope (AFM), electrostatic force microscope (EFM), magnetic force microscope (MFM), scanning electrochemical microscope (SECM), Scanning Ion Conductance Microscopy (SICM), etc., the basic principle is to use the conductive probe to scan the sample to be tested, and simultaneously detect the interaction between the conductive probe and the sample during the scanning process (tunneling current, interaction Force, electrostatic force, magnetic force, electrochemical current, etc.), so as to obtain relevant information (morphology, structure, conductivity, etc.) of the surface of the sample to be tested. Compare...

AI Technical Summary

Problems solved by technology

However, the use of precision displacement detection instruments and precision standard samples requires high costs and additional devices. At present, the industry still lacks a simple and effective scanning range for the scanning electrochemical microscope integrated in the scanning conductive probe microscope system. and the method of correcting for the linear relationship

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