Mask plate storage conveying device and method
A technology for transportation devices and mask plates, which is applied in transportation and packaging, manual transportation devices, conveyor control devices, etc., can solve the problems of dust, affecting the quality of photolithography process, and the production process cannot be carried out normally, so as to simplify the structure, The effect of improving the level of automation and reducing the volume
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0043] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0044] In view of the above-mentioned background technology, the inventor analyzed that the main reason is that the storage box of the mask plate cannot be changed between the horizontal state and the vertical state, and vertical storage boxes and horizontal storage boxes are generally used in the storage and transportation of the mask plate. The mask plate in the vertical storage box is placed vertically, but the mask plate on the equipment using the mask plate needs to be placed horizontally, so it is necessary t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com