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Preparation method of flexible film pressure sensor

A pressure sensor, flexible film technology, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problem of small measuring range of the sensor, and achieve the effect of high sensitivity

Active Publication Date: 2019-06-28
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the measurement range of these sensors is generally very small (5Pa ~ 50KPa)

Method used

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  • Preparation method of flexible film pressure sensor
  • Preparation method of flexible film pressure sensor
  • Preparation method of flexible film pressure sensor

Examples

Experimental program
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Embodiment

[0043] like figure 1 As shown, it is a structural schematic diagram of a flexible thin-film pressure sensor provided by the present invention. From top to bottom, it is an upper flexible substrate 1, an upper electrode layer 2, an upper sensitive thin-film layer 3, a lower sensitive thin-film layer 4, and a lower electrode layer 5. and the lower flexible substrate 6, wherein the upper and lower flexible substrates are PI (polyimide), the upper and lower electrode layers are silver electrodes, and the sensitive film layer is TPU (thermoplastic polyurethane), Carbon Black (conductive carbon black), DMAc (Dimethylacetamide) and dibutyl phthalate are uniformly mixed to make a composite material layer.

[0044] The preparation method of the above-mentioned flexible film pressure sensor specifically comprises the following steps:

[0045] Step 1: Take 0.45g of conductive carbon black and add it to 10g of DMAc (dimethylacetamide) solvent. At normal temperature and pressure, use an u...

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Abstract

The invention, which belongs to the technical field of pressure sensor preparation, discloses a preparation method of a flexible film pressure sensor. The method comprises: step one, forming an electrode layer on a flexible substrate; step two, adding an organic solvent into a conductive filler, carrying out fixing uniformly to obtain a mixed solution A, adding a polymer matrix material and a modifier into the mixed solution A, and carrying out fixing uniformly to obtain a slurry; step three, carrying out stirring and coating the flexible substrate with the electrode layer with the obtained composite slurry by means of silk-screen printing to obtain a sensitive layer having a surface microstructure; and step four, placing the two flexible structures with the sensitive layers and the electrode layers in opposite and carrying out packaging to obtain a flexible film pressure sensor. According to the invention, the prepared flexible film pressure sensor has advantages of high sensitivity being less than 5kPa<-1>, wide measuring range of from 50Pa to 1.5MPa, and short response time from 5 to 30ms and has the broad application prospects in fields of electronic skin, human body biologicalsignal detection and vibration signal detection.

Description

technical field [0001] The invention relates to flexible thin film pressure sensor technology, in particular to a preparation method of a flexible thin film pressure sensor with high sensitivity, wide measurement range, low response time and good stability. The sensor can be used in electronic skin, human-computer interaction perception, smart wearable devices and other fields. Background technique [0002] In recent years, wearable sensors have attracted a lot of attention. This is a flexible sensor that can be worn on the human body to detect human body signals including pulse, sound, body changes and other physiological signals. As an important part of wearable sensors, flexible pressure sensors have also attracted the attention of researchers at home and abroad. [0003] Conductive Polymer Composites (CPCs) based on the theoretical model of percolation conduction and current tunneling is an important sensitive material for piezoresistive flexible pressure sensors. This...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20
Inventor 蒋书文于江涛肖瑶术洋溢张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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