Symmetrical three-dimensional micromanipulator with three-stage motion amplification mechanism

Abstract

The invention discloses a symmetrical space three-dimensional micro-manipulator with a three-stage motion amplification mechanism, and aims to provide a micro-manipulator with small volume, compact structure, stable and reliable clamping force and high motion precision. It consists of a base and multiple clamping modules, and each clamping module includes a piezoelectric ceramic driver, a bridge-type displacement amplification mechanism, two lever displacement amplification mechanisms, a Z-beam displacement amplification mechanism, two flexible guide mechanisms and Gripper; the piezoelectric ceramic driver is arranged between the base and the movable end of the bridge-type displacement amplifying mechanism; the piezoelectric ceramic driver drives the movable end of the bridge-type displacement amplifying mechanism, and the output end of the bridge-type displacement amplifying mechanism drives the lever displacement amplifying mechanism The input end of each lever displacement amplifying mechanism respectively drives the input end of the Z-beam displacement amplifying mechanism, and the output end of the Z-beam displacement amplifying mechanism is fixedly connected with the jaws. The micromanipulator has the advantages of compact structure, stable and reliable clamping force, low cost and high motion precision.

Description

technical field [0001] The invention belongs to the technical field of micro-nano robots, and more specifically relates to a symmetrical three-dimensional micro-manipulator with a three-stage motion amplification mechanism. Background technique [0002] In recent years, with the rapid development of microelectronics, life science and robotics, the application of micro-nano devices has become more and more extensive. The integration of micro-nano manufacturing, packaging and testing, and precision operation with other basic disciplines has become increasingly close, and has become one of the important cutting-edge science and technology leading scientific development and engineering applications, and has attracted extensive attention from many experts and scholars. Micro-nano manipulation technology has been widely used in many fields such as bioengineering, micro-device bonding, optical device assembly and optical fiber docking. [0003] As the end effector of the micro-ope...

AI Technical Summary

Problems solved by technology

The traditional micro-manipulator only has a two-dimensional planar structure, and there are only two grippers. When combined with the micro-manipulator robot arm, it needs to use specific bases and other devices. The clamping direction is generally perpendicular to the axis of the robot arm, and generally can only The "pinch" action limits the application range of micro-manipulation robots and increases the difficulty of manipulator motion control

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