Field enhancement factor extraction method, device, system and storage medium

Abstract

The present application relates to a method, an apparatus, a system, and a storage medium for extracting a field enhancement factor. The method comprises: collecting an electrode spacing of an electrostatic transducer and the corresponding current between the electrodes at each deformation time, wherein the deformation time is a moment during deformation of the movable electrodes of the electrostatic transducer under a bias voltage; and fitting a linear relation obtained according to each electrode spacing and each current between the electrodes to obtain a fitting relation, and obtaining thefield enhancement factor of a field electron emission effect of the electrostatic transducer according to the fitting relation. According to the method for extracting the field enhancement factor, itcan be fully considered that after the bias voltage is applied, the electrodes of the electrostatic transducer will be deformed and each electrode spacing will gradually become smaller during the deformation, so that the error caused by each electrode spacing is regarded as a fixed value is avoided. The field enhancement factor obtained by the method is more consistent with the actual working condition of the electrostatic transducer, thereby improving the accuracy of acquiring the field enhancement factor.

Description

technical field [0001] The present application relates to the technical field of micro-electro-mechanical systems, in particular to a field enhancement factor extraction method, device, system and storage medium. Background technique [0002] An electrostatic transducer is a capacitor made of two conductors that can store opposite charges. According to function, electrostatic transducers can be divided into sensors and actuators. In the field of MEMS (Micro Electro Mechanical Systems, microelectromechanical systems), because many devices usually have a large surface area / volume ratio and very small mass, electrostatic force has become a common driving method in MEMS, so that electrostatic transducers widely used in this field. Among them, common electrostatic MEMS devices include RF (Radio Frequency, passive devices) MEMS switches, MEMS micromirrors, MEMS inertial devices, and the like. [0003] During the working process of the electrostatic transducer, due to the imperf...

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Problems solved by technology

[0004] Therefore, it is very important to obtain the field enhancement factor β corresponding to the research on the electrostatic transducer. However, during the implementation process, the inventors found that there are at least the following problems in the traditional technology: the field enhancement factor β obtained by the traditional technology is inaccurate

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