Ultrahigh vacuum heat treatment furnace for high-frequency superconducting cavity

Abstract

The invention discloses an ultrahigh vacuum heat treatment furnace for a high-frequency superconducting cavity. The ultrahigh vacuum heat treatment furnace comprises a machine frame and an ion pump, wherein the ion pump is installed on the machine frame; the ion pump comprises an ion pump shell, a heating inner container is arranged in the shell, and an outer vacuum chamber is formed between the heating inner container and the shell; an inner vacuum chamber is formed inside the heating inner container, a workpiece conveying pipe is arranged at the top of the shell, and the workpiece conveyingpipe is in communication with the inner vacuum chamber; and a workpiece is conveyed into the inner vacuum chamber from the workpiece conveying pipe, a heater and a heat shielding layer are installed in the outer vacuum chamber, the heat shielding layer surrounds a circle of the inner wall of the outer vacuum cavity, and the heater heats the heating inner container. The ultrahigh vacuum heat treatment furnace is a double-vacuum heat treatment device, the heater, the heat shielding and the like are arranged outside a furnace cavity, so that no other substances exist in the furnace except the metal material of the furnace shell, and an implementation possibility is provided for the environment with ultrahigh vacuum and non-pollution sources.

Description

technical field [0001] The invention relates to a double-vacuum heat treatment device, in particular to an ultra-high vacuum heat treatment furnace for a high-frequency superconducting cavity. Background technique [0002] The high-frequency cavity is an important part of the high-energy particle cyclotron, which provides energy for the particles to accelerate to close to high-speed rotation in the vacuum tube. The common high-frequency cavity is made of copper material, the power consumption P is 470kW, and the power consumption P made of superconducting material niobium is 1W. However, the critical superconducting temperature of niobium is 9K, and it must be immersed in 4.2K liquid helium before it can be used. Coating a layer of special materials on the niobium cavity can increase the superconducting temperature and save a lot of refrigeration equipment costs. According to the theoretical settlement, the temperature is doubled, and the refrigeration cost is reduced by 10...

AI Technical Summary

Problems solved by technology

As a superconducting material, it must be heat-treated in a very high vacuum (10-7Pa) and very clean environment, otherwise very small oxidation and pollution will cause an increase in resistance, and thus local rapid temperature rise under high frequency and large current, resulting in burn the whole part

Vacuum heat treatment devices in the existing market cannot meet this requirement. Generally, there are a large number of parts such as heaters, insulating materials, and heat shields in the vacuum furnace. Cavity

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