Flat panel detector structure and its preparation method

Abstract

The invention provides a flat panel detector structure and a preparing method thereof. The preparing method comprises the steps of providing a substrate and preparing a lower electrode layer on the substrate; providing a radiation absorbing material liquid, wherein the radiation absorbing material liquid comprises a lead-containing compound liquid; and coating the radiation absorbing material liquid on a lower electrode layer to prepare a light-converting layer on the lower electrode layer based on the coated radiation absorbing material liquid; and preparing an upper electrode layer on the light-converting layer. The structure and method of the invention improve the materials of the existing light-converting layer, improve the radiation absorption capability of the light-converting layer,reduce the thickness of the light-converting layer, design the forming method of the light-converting layer and solve the problem in forming a polycrystalline structure. Furthermore, the chemical composition and phase uniformity of the device are improved; the uniformity of the image is raised; the effective utilization of raw materials is raised; the process equipment is simplified; the structure of the detector is designed; the problem of leakage current is mitigated; the noise of detector is reduced; the sensitivity and the contrast ratio are raised; the electrode materials of the detectorare improved; and the cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of radiation detection, and in particular relates to a structure and a preparation method of a flat panel detector. Background technique [0002] X-ray radiation imaging utilizes the short-wavelength and easy-to-penetrate properties of X-rays, and the different characteristics of X-ray absorption by different substances, and imaging is performed by detecting the intensity of X-rays that pass through the object. Direct flat panel detector is a technology that uses semiconductor materials to directly convert X-ray photons into carriers (electrons or holes) and read out imaging. The direct flat panel detector has the characteristics of high sensitivity and high contrast, and can be used in medical radiation imaging, industrial flaw detection, security inspection and other fields. [0003] At present, direct-type flat panel detectors based on amorphous selenium (Se) materials occupy the absolute mainstream. The...

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Problems solved by technology

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a flat panel detector structure and its preparation method, which are used to solve the problems of poor absorption and other problems existing in the transfer light layer materials in the prior art.

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