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Preparation method and product of a flexible humidity sensor

A humidity sensor and flexible technology, which is applied in the field of preparation of flexible humidity sensors, can solve the problems of no elastic-plastic deformation such as stretching and bending, slow response speed of electrical humidity sensors, and high stability of humidity sensors, etc., to achieve flexibility and extension Good performance, easy quality control and low cost

Active Publication Date: 2020-10-02
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the optical humidity sensor mainly uses physical principles and various characteristics of materials to replace the tape measurement with easy-to-handle quantities, so as to obtain a higher-precision, miniaturized and intelligent humidity sensor. However, this integrated optical humidity sensor still exists. Some difficult problems, such as the stability of the humidity sensor is greatly affected by the physical size of the device, the stability is difficult to guarantee, and the preparation process of this type of photonic crystal structure device is complicated, and it does not have the ability of elasto-plastic deformation such as stretching and bending. Poor adaptability; the electrical humidity sensor is reliable and stable, and the preparation process is simple, but the electrical humidity sensor currently has shortcomings such as slow response speed and insufficient precision. Disadvantages of ability and poor environmental adaptability

Method used

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  • Preparation method and product of a flexible humidity sensor
  • Preparation method and product of a flexible humidity sensor
  • Preparation method and product of a flexible humidity sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] A method for preparing a flexible humidity sensor of this embodiment, the specific steps of the method are as follows:

[0045] Step 1, photolithography and development

[0046] Attach a layer of PET film on the surface of the cleaned transparent glass substrate, and then spin-coat a layer of photoresist on the PET, and go through the steps of pre-baking, exposure, post-baking, and post-cooling development to obtain electrodes arranged in an array mask graphics.

[0047] Step 2, remove the residual glue

[0048] A plasma stripper is used to remove the remaining unexposed photoresist and activate the surface of the substrate to enhance the adhesion between the subsequent sputtered metal electrodes and the substrate.

[0049] Step 3, sputtering to prepare metal electrodes

[0050] A sputtering layer of metal is deposited on the above substrate by sputtering process, the sputtering power is adjusted to 50W, the thickness of the sputtered metal electrode is 5nm by adjust...

Embodiment 2

[0057] A method for preparing a flexible humidity sensor of this embodiment, the specific steps of the method are as follows:

[0058] Step 1, photolithography and development

[0059] Attach a layer of PET film on the surface of the cleaned transparent glass substrate, and then spin-coat a layer of photoresist on the PET, and go through the steps of pre-baking, exposure, post-baking, and post-cooling development to obtain electrodes arranged in an array mask graphics.

[0060] Step 2, remove the residual glue

[0061] A plasma stripper is used to remove the remaining unexposed photoresist and activate the surface of the substrate to enhance the adhesion between the subsequent sputtered metal electrodes and the substrate.

[0062] Step 3, sputtering to prepare metal electrodes

[0063] Deposit and sputter a layer of metal on the above substrate by sputtering process, adjust the sputtering power to 200W, adjust the vacuum degree and time of sputtering so that the thickness o...

Embodiment 3

[0070] A method for preparing a flexible humidity sensor of this embodiment, the specific steps of the method are as follows:

[0071] Step 1, photolithography and development

[0072] Attach a layer of PET film on the surface of the cleaned transparent glass substrate, and then spin-coat a layer of photoresist on the PET, and go through the steps of pre-baking, exposure, post-baking, and post-cooling development to obtain electrodes arranged in an array mask graphics.

[0073] Step 2, remove the residual glue

[0074] A plasma remover is used to remove residual photoresist and activate the surface of the substrate to enhance the adhesion between the subsequent sputtered metal electrodes and the substrate.

[0075] Step 3, deposition and sputtering to prepare metal electrodes

[0076] Deposit and sputter a layer of metal on the above substrate by sputtering process, adjust the sputtering power to 100W, adjust the vacuum degree and time of sputtering so that the thickness of...

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Abstract

The invention belongs to the technical field of humidity sensors, and discloses a preparation method for a flexible humidity sensor, and a product. The preparation method for the flexible humidity sensor comprises the following steps that: (1) carrying out photoetching and development; (2) removing residual adhesive and an activated flexible substrate to enhance the adhesion of a base; (3) sputtering to prepare a metal electrode, and sputtering one layer of metal electrode material on the surface of the activated base so as to obtain a base with a metal electrode structure in array arrangement; and (4) enabling a super-hydrophilic humidity sensitivity layer to grow, depositing one Cu seed layer on the surface of the base, and horizontally placing in the mixed solution of NaOH and (NH4)2S2O8 so as to enable a super-hydrophilic Cu(OH)2 nanowire to grow on the Cu seed layer. The invention also discloses a humidity sensor. The prepared humidity sensor has the characteristics of being flexible, transparent, good in ductility, high in response speed, small in hysteresis, high in sensitivity, good in repeatability, stable in performance, simple in preparation technologies, convenient in control and low in cost.

Description

technical field [0001] The invention belongs to the technical field of humidity sensors, and more specifically relates to a preparation method and products of a flexible humidity sensor. Background technique [0002] Sensor technology is one of the high and new technologies rapidly developed in the world today, and it is also an important symbol of contemporary scientific development. Together with communication technology and computer technology, it constitutes the three pillars of the information industry. The view that "there is no modern science and technology without sensing technology" has been recognized all over the world. The more developed science and technology, the higher the automation technology, the greater the dependence on sensors. Therefore, both at home and abroad generally attach importance to and invest in the development of various sensors and sensing technologies. [0003] Humidity sensor is one of the development directions of modern sensing technol...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/04
CPCG01N27/048
Inventor 廖广兰方涵林建斌谭先华史铁林
Owner HUAZHONG UNIV OF SCI & TECH
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