Semiconductor production line dynamic load balanced feeding control method

Abstract

The invention relates to a semiconductor production line dynamic load balanced feeding control method. The semiconductor production line dynamic load balanced feeding control method comprises dynamically acquiring semiconductor production line total load through an ELM-based (extreme learning machine-based) load balanced feeding control parameter model, and under the guidance of the semiconductorproduction line total load, achieving semiconductor production line dynamic load balanced feeding control through load control theories. The semiconductor production line dynamic load balanced feedingcontrol comprises the following steps of 1) structuring the load balanced feeding control parameter model, and inputting the real-time state and feeding information of a production line into the loadbalanced feeding control parameter model to dynamically acquire the semiconductor production line total load TWL_total; 2) structuring a semiconductor production line load balanced model, and according to the semiconductor production line total load TWL_total, acquiring feeding strategy information, including workpiece priority, feeding triggering mechanisms and feeding volume. Compared with theprior art, the semiconductor production line dynamic load balanced feeding control method has the advantages of being high in feeding control practicality and capable of reducing the number of products in process, shortening the production cycle, improving the production efficiency and the like.

Description

technical field [0001] The invention relates to a method in the field of automatic control, in particular to a dynamic load balancing feeding control method for a semiconductor production line, which belongs to the field of advanced manufacturing technology. Background technique [0002] The control and scheduling of semiconductor production lines has always been a hot topic in the academic and engineering circles. The research on optimal scheduling and control of semiconductor production line has important economic value and academic value. A good scheduling control strategy can help companies quickly respond to market demand, improve the ability of products to meet customer needs, ease capital accumulation, buffer storage space, reduce the time wafers are exposed to air, and improve production yield. [0003] There are two main types of scheduling on semiconductor production lines: feeding control and workpiece scheduling. The feeding control is at the front end of the d...

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Problems solved by technology

[0005] However, the above methods also have their own problems. For example, CONWIP will cause in-process product accumulation, and CONLOAD and SA cannot adapt to the "bottleneck drift" situation. Although the WR theory proposes a method to control the load of the entire production line, in practical applications, it is often only Focus on controlling bottleneck device workloads

Moreover, the above method ignores a large amount of related data that implies the characteristics of the actual scheduling environment of the production line and scheduling knowledge, which leads to the fact that the research results cannot be directly applied to the actual production line.

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