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Composite jet flow micro-nano machining method and device

A technology of micro-nano processing and jet flow, which is applied in the direction of accessory devices, electric processing equipment, metal processing equipment, etc., can solve the problems of difficult processing, processing localization, processing accuracy and surface quality, and limited size, etc., to achieve Low manufacturing cost, improved processing localization, high efficiency and low effect

Inactive Publication Date: 2019-03-19
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the size of its processing features is limited by the diameter of the nozzle, and it is not easy to process features of tens of microns or even several microns. In addition, its processing localization, processing accuracy and surface quality are relatively low.

Method used

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  • Composite jet flow micro-nano machining method and device
  • Composite jet flow micro-nano machining method and device
  • Composite jet flow micro-nano machining method and device

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Embodiment 1

[0031] Such as figure 1 As shown, the composite jet micro-nano processing device of the present invention includes a multi-constraint composite nozzle 10, a workpiece anode 20 and a narrow pulse width group pulse electrolysis power supply 30;

[0032] Such as figure 2 , 3 As shown, the multi-constraint composite nozzle 10 includes an upper cover plate 11, a rubber plug 12, a lock nut 13, an electrode wire 14, a cavity 15, a nozzle 16, an O-ring 17 and a nozzle fixing sleeve 18;

[0033] The cavity 15 is an entity with a cavity inside. The upper part of the cavity 15 has an end face fitted with the upper cover plate 11. The end face is provided with a connecting hole 152. The cavity 15 is connected to the upper cover plate 11 through the connecting hole 152. threaded connection; the side wall of the cavity 15 has an electrolyte inlet hole 151, and the center of the bottom of the cavity 15 has a slender electrolyte outlet flow channel 154; the central axis of the cavity 15 is...

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Abstract

The invention discloses a composite jet flow micro-nano machining method and device. The upper end of an electrode wire is fixed, the lower end of the electrode wire penetrates through a nozzle to form an overhanging end, an electrolyte is added into a nano polishing particle, when the electrolyte is sprayed out through a nozzle at the high speed, the electrolyte is subject to jet flow, the electrode wire overhanging end is straightened, the electrode wire is subjected to radial position restraint, the upper end of the electrode wire is connected with a negative electrode of a narrow pulse wide group pulse electrolysis power source, a workpiece anode is connected with a positive electrode of the narrow pulse wide group pulse electrolysis power source, the electrolysis effect is generated between the electrode wire overhanging end and the machining surface of the workpiece anode, the nano polishing particle is driven by the electrolyte to carry out polishing on the machining surface ofthe workpiece anode, and composite machining of the workpiece anode machining surface is achieved until the needed micro structure characteristics are obtained. The machining method and device can effectively improve the locality of micro electrolytic machining, the stray corrosion phenomenon can be effectively restrained, the medium transfer process can be improved, and high-precision, high-surface-quality and high depth and width ratio micro structure characteristic efficient machining is achieved.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing, and in particular relates to a compound jet micro-nano processing method and a processing device. Background technique [0002] Micro-structural features such as micro-holes and micro-grooves are widely used in high-tech weaponry, aerospace equipment, automobile manufacturing, medical equipment, smart devices and other fields. At present, the processing methods for micro-structural features mainly include micro-EDM technology , Micro-cutting processing technology, laser processing technology, electrolytic processing technology, etc. Among them, electrolytic machining technology is a processing method for removing metal materials at the atomic level by electrochemical anodic dissolution. It has the advantages of no recast layer, no tool loss, no heat-affected zone, high processing efficiency, and good surface quality. It has great potential and has many applications in scientific re...

Claims

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Application Information

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IPC IPC(8): B23H9/16B23H3/00B23H11/00
CPCB23H3/00B23H9/16B23H11/00
Inventor 张勇斌荆奇李建李飘庭刘广民李建原王锋王卿
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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