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An Evaporation Process for Non-discoloration of Glass

A glass and evaporation technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problems of yellowish and reddish glass surface, affecting product quality, and yellowish glass surface. To achieve the effect of removing dirt, preventing batch scrap, and solving different colors

Active Publication Date: 2021-07-23
LENS TECH CHANGSHA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when the traditional evaporation method is used for processing glass products, the glass surface tends to appear yellowish and reddish. The phenomenon of yellow and reddish will lead to bad batches, which will seriously affect the quality of the product and increase the cost

Method used

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  • An Evaporation Process for Non-discoloration of Glass
  • An Evaporation Process for Non-discoloration of Glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] An evaporation process for glass without discoloration, comprising the following steps:

[0028] Step 1: Ion source cleaning, specifically: under the conditions of argon flow rate of 800-1200Sccm and oxygen flow rate of 400-800Sccm, plasma cleaning is performed on the glass in the coating equipment with a voltage of 750-850V, and the cleaning time is 480- 720S.

[0029] Step 2: Deposit Si x N y , specifically: vacuumize the cavity of the coating equipment to 3×10 -5 -5×10 -5 Torr, and argon and nitrogen are introduced, and the silicon molecules in the silicon target are sputtered out by radio frequency sputtering silicon targets, and the silicon molecules and nitrogen react in the cavity to form Si x N y , and deposited on the glass surface, wherein the argon flow rate is 80-180Sccm, the nitrogen flow rate is 70-130Sccm, the RF sputtering silicon target power is 4.5-5.5KW, where x is a natural number from 1 to 3, and y is from 2 to 6 Natural number (preferably, Si...

Embodiment 2

[0040] The difference between this embodiment and embodiment 1 is that in step 2, the flow rate of argon gas is 80Sccm, the flow rate of nitrogen gas is 70Sccm, the power of the RF sputtering silicon target is 4.5KW, and the rest are the same as in embodiment 1.

[0041] The processing effect of this embodiment is shown in Table 1.

Embodiment 3

[0043] The difference between this embodiment and embodiment 1 is that in step 2, the flow rate of argon gas is 180Sccm, the flow rate of nitrogen gas is 130Sccm, the power of the RF sputtering silicon target is 5.5KW, and the rest are the same as in embodiment 1.

[0044] The processing effect of this embodiment is shown in Table 1.

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Abstract

The invention provides an evaporation process for glass without discoloration, including ion source cleaning, specifically: performing plasma cleaning on glass; depositing Si x N y , specifically: evacuate the cavity of the coating equipment, and pass in argon and nitrogen, use radio frequency sputtering silicon target to sputter out the silicon molecules in the silicon target, and the silicon molecules and nitrogen react in the cavity to form Si x N y , and deposited on the glass surface; the coating material, specifically: heating the film material to evaporate the film material and deposit it on the Si x N y layer. Applying the technical solution of the present invention, the effect is: it can effectively reduce the poor appearance of the coated glass, improve the coating yield, and eliminate the phenomenon of batch scrapping; by optimizing the process flow and process parameters, the problem of redness on the surface of the coated glass can be solved, and the coated glass can be colorless and transparent processing technology.

Description

technical field [0001] The invention relates to the technical field of glass evaporation, in particular to an evaporation process for glass without discoloration. Background technique [0002] With the rapid development of mobile phone glass covers, consumers have higher and higher requirements for the appearance of mobile phones. The evaporation process plays an important role in the processing of mobile phone glass covers; evaporation, the method is to heat the material in a vacuum environment, so that A method of obtaining a thin film material by vaporizing it and depositing it on a substrate. The traditional evaporation method of glass products is to pass argon and oxygen into the cavity of the coating equipment, and then heat the film material to evaporate the film material and deposit it on the surface of the glass product. [0003] However, when the traditional evaporation method is used for processing glass products, the glass surface tends to appear yellowish and r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34C23C14/26C23C14/12C03C17/42
CPCC03C17/42C03C2218/151C03C2218/155C23C14/0036C23C14/0652C23C14/12C23C14/26C23C14/34
Inventor 周群飞何有斌
Owner LENS TECH CHANGSHA
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