A diffusion furnace air intake device for photovoltaic cell manufacturing and its control method

Abstract

The invention relates to the technical field of photovoltaic manufacturing, and discloses a diffusion furnace air inlet device for manufacturing a photovoltaic cell and a control method thereof. The device comprises a main through pipe, a flow control valve I and a constant temperature tank, an inlet end of the main through pipe is provided with a flow rate control valve I, the top end of the constant temperature tank is fixedly sleeved with a current carrying tube and an air inlet tube, and the current carrying tube is located outside the constant temperature tank and is provided with a flowcontrol valve II. The device weighs the constant temperature tank by a weighing sensor to detect the weight change rate of the constant temperature tank which is the weight change rate of a POCl3 carried by a small N2, a PLC controller and a pneumatic regulating valve cooperate with each other, according to the feedback data of the weighing sensor, the O2 content of the main through pipe through an oxygen inlet pipe is controlled to ensure that the O2 is introduced in a ratio required by the process reaction, the inlet amount of the O2 and the unit time supply of POCl3 in the constant temperature tank can achieve real-time dynamic balance according to the ratio required by the process reaction, the resource utilization rate is improved, and the additional load intensity brought by the excessive O2 introduction to the temperature control system is reduced.

Description

technical field [0001] The invention relates to the technical field of photovoltaic manufacturing, in particular to a diffusion furnace air intake device for photovoltaic cell manufacturing and a control method thereof. Background technique [0002] Crystalline silicon solar cells are the core equipment in the photovoltaic power generation industry, and the P-N junction is the core of crystalline silicon solar cells and one of the key factors for the photoelectric conversion efficiency of cells. The existing production of P-N junctions includes alloy method, diffusion method and epitaxial growth method, etc. The more common domestic industrial production of P-N junctions mostly adopts the diffusion method, and the wafer is processed in a diffusion furnace. [0003] Industrial production of P-N junctions mostly uses POCl 3 Pyrolysis diffusion method, under the premise of maintaining the positive pressure in the diffusion furnace, keep the temperature in the diffusion furnace...

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Problems solved by technology

[0005] Aiming at the deficiencies in the use process of the existing diffusion furnace air intake mechanism proposed in the background technology, the present invention provides a diffusion furnace air intake device for photovoltaic cell manufacturing and its control method, which has oxygen supply and POCl 3 The advantages of achieving dynamic balance of feed and saving energy consumption solve the problems of increased load on the temperature control system and increased ineffective energy consumption caused by excessive oxygen supply in the above-mentioned background technology

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