A Micro-mechanical Electrostatically Driven Arc-shaped Comb Structure

Abstract

An arc-shaped comb structure driven by micro-mechanical electrostatics, which relates to the technical field of micro-mechanical electrostatic drives; it includes n groups of identical arc-shaped comb groups; n groups of arc-shaped comb groups are evenly distributed on the outer edge of an external arc-shaped device ;Each group of arc-shaped combs includes static combs and moving combs; the static combs and moving combs are F-shaped hammer-like structures that are staggered; driven by external static electricity; the moving combs are external arc-shaped devices The center is the center of the circle, and moves closer or farther away from the static comb teeth; when the static comb teeth cooperate with the movable comb teeth, the first movable electrode extends between the first fixed electrode and the second fixed electrode; the second movable electrode is located at the The radial outer side of the second fixed electrode; the present invention realizes the improvement of the mechanical movement displacement under the same vacuum environment and driving voltage as the traditional technology, and does not increase the difficulty of the process.

Description

technical field [0001] The invention relates to the technical field of micro-mechanical electrostatic drive, in particular to an arc-shaped comb structure for micro-mechanical electrostatic drive. Background technique [0002] Electrostatic drive is an important method of micro-mechanical drive technology, and it is widely used in the current MEMS field. At present, the most common structure in the electrostatic driving structure is a rectangular planar comb array structure. However, the current rectangular comb-tooth electrostatic driver has the problems of relatively small driving force and too high driving voltage. However, the application occasions of micro-electromechanical devices often have upper limit requirements on the driving voltage, and it is hoped to reduce the driving voltage as much as possible or increase the driving displacement. The common way to solve this contradiction is to increase the number of comb teeth to form an array. The disadvantage of incre...

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Problems solved by technology

[0003] Invention patent application "A Comb Structure Driven by Micromechanical Electrostatics" (Application No. 201410440148.7) proposes that the shape of the comb adopts a combination of triangle and trapezoid, or a combination of triangle and rectangle, or a combination of trapezoids, reducing The driving voltage of the structure, but it is only applicable to the driving mode in which the driving displacement is perpendicular to the comb direction

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