A scanning near-field optical detection platform

Abstract

The invention provides a scanning near-field optical detecting table which comprises a body (22) and a rectangular operation platform (18). The body comprises an XOY face, a YOZ face and a ZOX face. The XOY face, the YOZ face and the ZOX face are perpendicular to one another. Containing space is defined by the XOY face, the YOZ face and the ZOX face. The rectangular operation platform (18) used for containing workpieces (17) is contained in the containing space. The rectangular operation platform comprises a bottom face and four side faces, wherein every two adjacent side faces are perpendicular to each other. The four corners of the bottom face of the rectangular operation platform are provided with four hydraulic driving units (21) fixed to the XOY face of the body. The two adjacent side faces of the rectangular operation platform are provided with two hydraulic driving units (11) fixed to the YOZ face and the ZOX face of the body respectively. The YOZ face is provided with a nozzle unit located above the workpieces and used for achieving positioning of the workpieces in the Z-axial direction. According to the scanning near-field optical detecting table, the elongation of a strut is adjustable and detectable, so that the accuracy of displacement of the operation platform is high, control is simple, and the effective travel of motion of the operation platform is large.

Description

technical field [0001] The invention relates to the field of optical mechanics, in particular to a scanning near-field optical detection device. Background technique [0002] With the increasing integration of modern optical systems, the scale of optical design structures is constantly decreasing. For sub-wavelength optical structures, the range of light fields that need to be detected is usually on the order of microns, and optical microscopes are no longer competent due to the limitation of the diffraction limit. A scanning near-field optical microscope based on optical probe technology provides a solution, which mainly includes a positioning module, a displacement module and a light field receiving and detecting module. Its main working principle is: the optical fiber probe is used to detect the coupled light field, which is fixed on the displacement device, and the optical probe is scanned within a certain range near the sample surface by controlling the positioning and...

AI Technical Summary

Problems solved by technology

In actual work, there are inevitably errors in the position and direction of the point of action of the force F, and there are inevitably errors in the manufacture of the flexible hinge mechanism. There is mutual coupling between them, and the sports board 1 cannot move strictly in the x direction

[0004] The existing 3D scanning mobile workbench generally has multiple (usually 3) parallelogram flexible hinges arranged orthogonally to each other, and the components are connected in a solid state. Due to the complex coupling of the movement and force of each dimension, There is inevitably a certain error in the movement of the three-dimensional worktable, and this error is difficult to eliminate

The micro-drive of the existing 3D scanning mobile workbench generally adopts piezoelectric crystal driver, which has high driving precision, but the effective stroke is very small, so it needs to be equipped with a coarse motion device, and the mechanism is relatively complicated

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