Heat treatment device for semiconductor integrated wafer production

Abstract

The invention discloses a heat treatment device for the production of semiconductor integrated wafers. There is a top cover, the bottom end of the top cover is connected with a top plate through a connecting rod, a telescopic rod is welded on the lower surface of the top plate, the bottom end of the telescopic rod is fixedly installed with a bottom plate through a first bearing, and the bottom plate and the outer side of the top plate are equal Three sets of sliders are welded at an angle, and the inner wall of the inner cylinder is provided with a chute corresponding to the sliders. The present invention heats the semiconductor integrated wafer by adding a motor and an electric heating net, and the motor can make the semiconductor integrated circular The wafer is rotated to avoid uneven heating of the semiconductor integrated wafer. The operator can remove the semiconductor integrated wafer from the inner cylinder by moving the top cover. The operation is simple and avoids the operator being scalded.

Description

technical field [0001] The invention relates to the technical field of semiconductor materials, in particular to a heat treatment device for semiconductor integrated wafer production. Background technique [0002] Semiconductors refer to materials whose conductivity is between conductors and insulators at room temperature. Semiconductors are widely used in radios, televisions and temperature measurement. For example, a diode is a device made of a semiconductor. A semiconductor refers to a material whose conductivity can be controlled and ranges from an insulator to a conductor. Whether from the perspective of technology or economic development, the importance of semiconductors is very huge. Most of today's electronic products , such as computers, mobile phones or digital recorders, the core units are closely related to semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is among various semiconductor materials. It i...

AI Technical Summary

Problems solved by technology

[0003] As a kind of semiconductor material, semiconductor integrated wafers need to be heat treated during production. When common heat treatment devices heat semiconductor integrated wafers, it is easy to cause uneven heating, which affects the quality of semiconductor integrated wafers, and , after the production of semiconductor integrated wafers is completed, it is necessary to take out the semiconductor integrated wafers from the heating device for cooling. In this process, it is very easy to cause the operator to be scalded

Images