A kind of high temperature heat flow sensor based on htcc and preparation method thereof

Abstract

The invention provides a high-temperature heat flow sensor based on HTCC and its preparation method. According to the sensitive mechanism of the thermopile heat flow sensor, a plurality of filling holes are set on the aluminum nitride green ceramic belt to integrate a plurality of thermocouples, which increases the thermoelectricity. The arrangement density of the couple increases the output potential of the thermocouple, and at the same time greatly improves the test sensitivity of the sensor; according to the difference in the thermal conductivity of the high-temperature resistant material, aluminum nitride is selected as the substrate of the sensor structure and the dielectric material of the middle layer. The choice of aluminum nitride material, platinum / 15% iridium alloy, and palladium gold greatly improves the response time of the sensor; the manufacturing process is simple, the sensitivity is high, the response block is good, the stability is good, and the installation is relatively convenient, which can realize Detection of heat flow in high temperature and large heat flow environments such as aerospace vehicles and engine interiors.

Description

technical field [0001] The invention relates to the field of heat flow sensing, in particular to an HTCC-based high-temperature heat flow sensor and a preparation method thereof. Background technique [0002] The combat performance requirements of high-speed, high-precision, and high-maneuverability aircraft in modern warfare have caused countries all over the world to compete to develop supersonic aircraft. With the rapid increase of supersonic vehicle flight speed, the environment of high temperature heat flow generated by aerodynamic heating becomes more and more severe. [0003] There will be a local high temperature zone higher than 1200 °C and a large heat flow environment at the end of the nose cone of the aerospace vehicle, the combustion chamber, and the exhaust port. Under extremely harsh ultra-high temperature and high heat flow environmental conditions, the heat flow monitoring on the surface of the aerospace vehicle and the interior of the engine combustion cha...

AI Technical Summary

Problems solved by technology

The limitations of the circular foil heat flow sensor are: the sensitivity coefficient is low, the response time is long, and it is not suitable for detecting transient heat flow; and when this type of sensor is used in a high temperature environment, it needs to be water-cooled and has a large volume

However, because the thin-film heat flow sensor adopts a two-dimensional plane layout, it can only integrate fewer thermocouples in a certain area compared with the three-dimensional structure, and its sensitivity is low, which is difficult to meet the requirements of testing in the harsh environment of ultra-high temperature (>1000°C). Require

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