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Adhesion method for optical glass with film-coating marked surface

A technology of optical glass and bonding method, which is applied in the field of optical glass processing with coating marking surface of lithography machine, which can solve the problems of scratched surface, easy edge chipping and easy pollution at the bottom, and achieve the effect of eliminating edge chipping

Inactive Publication Date: 2018-12-07
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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  • Summary
  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the deficiencies in the above-mentioned prior art, propose a kind of bonding method that is used for the processing of the optical glass of the coated marking surface, solve the problem that the optical glass of the coated marking surface and the spacer glass are easily polluted and scratched when the surface is glued together. There are bubbles in the middle of the glass, and the bottom is prone to chipping and other problems when processing through holes and shapes

Method used

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Embodiment Construction

[0019] A bonding method for processing optically coated marking plate glass, the method comprising the steps of:

[0020] 1. Select a suitable block glass and wipe it. The side length of the block glass is larger than the optical glass to be processed, and the flatness of the bonding surface of the block glass is better than 0.01mm.

[0021] 2. Confirm that the optical glass to be processed is not damaged: wear clean gloves and a mask on the ultra-clean workbench, and carefully watch the surface dust under a 100w light during the process. If there is, rinse it with deionized water at a pressure of 0.4-0.6mpa , and then rinse the surface of the optical surface of the optical glass to be processed with acetone, which is conducive to the rapid volatilization of the surface of the workpiece; remember, if it is an aluminum film, do not wipe it, otherwise the surface will be scratched.

[0022] 3. Pour the optical grade protective glue into a clean container.

[0023] 4. Choose a w...

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Abstract

The invention discloses an adhesion method for optical glass with a film-coating marked surface. The method includes: selecting a proper glass cushion and wiping the glass cushion; determining that the to-be-processed optical glass with the film-coating marked surface is free of damage; keeping optical protective glue and beeswax for adhesion clean, and selecting a hairbrush which must be made ofwool, which is not liable to fall off, length of the wool being larger than that of the to-be-processed glass. The method can effectively control the surface quality of the components after processing, and prevent the film-coating surfaces of the components from fouling and scratch, and can avoid edge breakage during shape processing and punching for forming bottoms of pores.

Description

technical field [0001] The invention relates to the technical field of processing optical glass with a coated marking surface of a photolithography machine, in particular to a bonding method for processing an optical glass with a coated coating surface that is easily scratched. Background technique [0002] At present, European and American countries are intimidating Chinese chips, and processing chips requires high-precision lithography equipment. The optical glass processing involved in this patent is widely used in the core components of lithography machines, especially marking plates with coated surfaces. In terms of its positioning and the function of signal enhancement, if there are surface quality problems such as contamination and scratches in the marked area of ​​the coating surface, it will lead to attenuation of the performance of the part or lead to the scrapping of expensive parts. At present, the precision requirements of processed products are getting higher a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C27/10
CPCC03C27/10
Inventor 陈静
Owner SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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