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Molybdenum niobium target manufacturing process

A manufacturing process and target material technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve problems such as abnormal discharge, reverse sputtering accumulation, and affecting target use, so as to ensure normal use , high density, and the effect of reducing abnormal discharge phenomena

Active Publication Date: 2020-06-19
爱发科电子材料(苏州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the manufacturing process of molybdenum-niobium targets on the market can only reach 98% of the theoretical density of the material. Targets with low density contain a large number of pore defects, and abnormal discharges will occur in places with pores during use. In addition, low-density targets The target will have anti-sputtering accumulation (mura), which will affect the use of the target

Method used

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  • Molybdenum niobium target manufacturing process
  • Molybdenum niobium target manufacturing process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] A molybdenum-niobium target manufacturing process in this embodiment includes the following steps:

[0020] Step 1, raw material mixing

[0021] The raw materials (Mo powder, Nb powder) are put into the storage bin according to the ratio of 8.5:1. The mixing process is as follows: Ar gas is introduced to replace the air for 15 minutes; the mixing rotation speed is 8 revolutions / min, and the working time is 120 minutes.

[0022] Step 2, glue set powder operation

[0023] Weigh the finished powder, weigh the required weight, and fill it into the rubber sleeve. When 25% of the weight is loaded, it needs to be vibrated for 1-5 minutes, preferably 2 minutes, and the final height is measured to ensure that it can Reaching more than 35% of theoretical density. In this step, it needs to be set in advance. When the theoretical density reaches 35%, what should be the height of the powder after the vibration operation? Once the powder reaches this height after vibration, it can ...

Embodiment 2

[0048] The difference from the first embodiment is that the following parameters of the manufacturing process of a molybdenum-niobium target in this embodiment are different.

[0049] In step 2 of the glue set powder operation, it is necessary to vibrate every time 25% of the weight is installed, and vibrate for 3 minutes.

[0050] In step five, 2) the temperature range during degassing is controlled at 350°C, and the vacuum degree is controlled at 1×10 －4In the range of Pa, the time is kept at 2.5h. 3) After degassing, the product is subjected to hot isostatic pressing: the temperature and pressure are controlled at 1500°C and 150MPa respectively, and the pressure and temperature rise are carried out simultaneously for 6 hours. Finally, after calendering, the product can reach 99.85% of its theoretical density.

Embodiment 3

[0052] The difference from the first embodiment is that the following parameters of the manufacturing process of a molybdenum-niobium target in this embodiment are different.

[0053] In step 2, during the glue set powder operation, it is necessary to vibrate and vibrate for 5 minutes every time 25% of the weight is loaded.

[0054] In step five, 2) the temperature during degassing is controlled at 350°C, and the vacuum degree is controlled at 5×10 －4 In the range of Pa, the time is kept at 4h. 3) After degassing, the product is subjected to hot isostatic pressing: the temperature and pressure are controlled at 1400°C and 130MPa respectively, and the pressure and temperature rise are carried out simultaneously for 2.5 hours. The density of the product can reach more than 98% of the theoretical density. Finally, after calendering, the product can reach 99.83% of its theoretical density.

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Abstract

The invention discloses a technology for making a molybdenum-niobium target material. The technology comprises the following steps: 1, mixing raw materials; 2, filling a rubber cover with obtained powder; 3, performing cold isostatic pressing working: rising the pressure at normal temperature, keeping the pressure for a predetermined time, and removing the pressure; and 4, performing hot isostaticpressing: sheathing the obtained cold isostatic pressing molded product by sequentially coating an internal material with an inner jacket and an outer jacket, performing welding sealing on the outerjacket, removing a gas between the internal material of the sheathed product and the inner jacket; and carrying out hot isostatic pressing on the gas-removed product. The technology can improve the density of the MoNb alloy target material.

Description

technical field [0001] The invention relates to a manufacturing process of a molybdenum-niobium target. Background technique [0002] The raw materials of the MoNb alloy target are Mo powder and Nb powder, which are used as coating materials for TFT liquid crystal panels, and the theoretical density of Mo-at% 10Nb: 9.99g / cm 3 . At present, the manufacturing process of molybdenum-niobium targets on the market can only reach 98% of the theoretical density of the material. Targets with low density contain a large number of pore defects, and abnormal discharges will occur in places with pores during use. In addition, low-density targets The target material will have reverse sputtering accumulation (mura), which will affect the use of the target material. Contents of the invention [0003] In order to overcome the above disadvantages, the object of the present invention is to provide a molybdenum-niobium target manufacturing process that reduces pores in the target, reduces a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34B22F3/04B22F3/15
CPCB22F3/04B22F3/15B22F2998/10C23C14/3414B22F1/0003
Inventor 常艳超臧卫祥尤小磊丁静仁程小明徐东起王冬振董意男董常亮高奇峰
Owner 爱发科电子材料(苏州)有限公司
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