A Method for Rutherford Backscattering Analysis of Large Area Target in Vacuum Target Chamber

Abstract

The invention discloses a method for RBS analysis of a large-area target in a vacuum target chamber. The invention sets a two-dimensional mobile platform that can move horizontally and vertically relative to the beam current in the vacuum target chamber, and the two-dimensional mobile platform is controlled by a control system. The mobile and control system realizes multi-point continuous measurement with the help of MAESTRO software, supports OLE technology with the help of SIMNRA software, and realizes SIMNRA batch analysis with the VBA script program of EXCEL. In the present invention, a two-dimensional mobile platform capable of moving horizontally and vertically relative to the beam is provided in the vacuum target chamber, thereby realizing two-dimensional scanning of the target, which is easy to implement and low in cost compared with the scanning of the accelerator beam.

Description

technical field [0001] The invention relates to the technical field of Rutherford backscattering analysis, in particular to a method for RBS analysis of a large-area target in a vacuum target chamber. Background technique [0002] RBS (Rutherford backscattering spectrometry) analysis can obtain information such as target composition, thickness or impurities, and has the characteristics of reliable analysis, high sensitivity, and quantitative analysis results without relying on standard samples. Such as figure 1 As shown, the existing RBS analysis needs the ion beam current provided by the accelerator. Some accelerators do not have the beam scanning function. Due to the complexity of the beam scanning technology, the deflection and focusing of the beam are difficult, and the implementation cost is high. Even in the microbeam ionbeam analysis technology (ie, PIXE, RBS), the accelerator can realize The sample is scanned and the surface distribution information of elements is ...

AI Technical Summary

Problems solved by technology

Some accelerators do not have the beam scanning function. Due to the complexity of the beam scanning technology, the deflection and focusing of the beam are difficult, and the implementation cost is high. Even in the microbeam ionbeam analysis technology (ie, PIXE, RBS), the accelerator can realize The sample is scanned and the surface distribution information of elements is obtained, but the scanned area is very small (a few millimeters). Usually, the diameter of the RBS analysis beam spot is 1-2 mm. To obtain the surface distribution of a large-area target of tens of millimeters, the number of measurement points is several Tens of hundreds, the measurement and analysis work is repetitive and boring, so it cannot meet the RBS analysis requirements of the above or larger area targets

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