Method for Rutherford backscatter analysis of large-area target in vacuum target chamber

Abstract

The invention discloses a method for RBS analysis of a large-area target in a vacuum target chamber. According to the method, a two-dimensional mobile platform capable of performing horizontal and vertical movement relative to a beam current is arranged in the vacuum target chamber, movement of the two-dimensional mobile platform is controlled by using a control system, and the control system performs multi-point continuous measurement by using MAESTRO software, supports the OLE technology by using SIMNRA software, and implements SIMNRA batch analysis by using an EXCEL VBA script program. As the two-dimensional mobile platform capable of performing horizontal and vertical movement relative to the beam current is arranged in the vacuum target chamber, two-dimensional scanning of a target isrealized; compared with accelerator beam scanning, the method is easy to implement, and low in cost.

Description

technical field [0001] The invention relates to the technical field of Rutherford backscattering analysis, in particular to a method for RBS analysis of a large-area target in a vacuum target chamber. Background technique [0002] RBS (Rutherford backscattering spectrometry) analysis can obtain information such as target composition, thickness or impurities, and has the characteristics of reliable analysis, high sensitivity, and quantitative analysis results without relying on standard samples. Such as figure 1 As shown, the existing RBS analysis needs the ion beam current provided by the accelerator. Some accelerators do not have the beam scanning function. Due to the complexity of the beam scanning technology, the deflection and focusing of the beam are difficult, and the implementation cost is high. Even in the microbeam ionbeam analysis technology (ie, PIXE, RBS), the accelerator can realize The sample is scanned and the surface distribution information of elements is ...

AI Technical Summary

Problems solved by technology

Some accelerators do not have the beam scanning function. Due to the complexity of the beam scanning technology, the deflection and focusing of the beam are difficult, and the implementation cost is high. Even in the microbeam ionbeam analysis technology (ie, PIXE, RBS), the accelerator can realize The sample is scanned and the surface distribution information of elements is obtained, but the scanned area is very small (a few millimeters). Usually, the diameter of the RBS analysis beam spot is 1-2 mm. To obtain the surface distribution of a large-area target of tens of millimeters, the number of measurement points is several Tens of hundreds, the measurement and analysis work is repetitive and boring, so it cannot meet the RBS analysis requirements of the above or larger area targets

Images