High precision liquid refractive index sensor
A technology of liquid refractive index and sensor, which is applied to the measurement of phase influence characteristics, etc., can solve the problems of low measurement accuracy, small sensor measurement range, complex device structure, etc., and achieve the effect of wide application prospects
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[0017] The present invention will be further described below in conjunction with the accompanying drawings. Here, near-infrared light is used as the incident light, its wavelength range is about 1525~1565nm, the polarization state is TM wave, the incident plane is on the x-z plane, and the incident angle θ 1°, the period of the grating T , groove depth H , step width d They are 0.60μm, 0.45μm, 0.45μm, pitch w is 0.80 μm. The substrate material is optical glass with a refractive index of 1.5. The grating dielectric material is single crystal silicon with a refractive index of 3.48.
[0018] Here, the performance of the liquid refractive index sensor provided by the present invention is simulated and analyzed by Fourier mode method. Here it is assumed that the range of the refractive index of the liquid to be measured is 1.33~1.41. The transmission spectrum of the sensor varies with the refractive index of the liquid as image 3 shown. Depend on image 3 It can be see...
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