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Organic vapor deposition device and control method thereof

An organic vapor and deposition device technology, applied in vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., to achieve the effect of quickly dredging the nozzle

Active Publication Date: 2018-11-06
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide an organic vapor deposition device and its control method, which are used to solve the problem of how to quickly unblock a clogged nozzle during the deposition process

Method used

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  • Organic vapor deposition device and control method thereof
  • Organic vapor deposition device and control method thereof
  • Organic vapor deposition device and control method thereof

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Embodiment Construction

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0032] Embodiments of the present invention provide an organic vapor deposition device, such as figure 1 As shown, it includes an organic material supply device 10 and a plurality of shower heads 20 connected with the organic material supply device 10; as figure 2 As shown, the shower head 20 includes a pressurization device 21, nozzles 22 and lasers 23 arranged on opposite sides of the pressurization device 21, and the organic material supply device 10 is us...

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Abstract

The invention provides an organic vapor deposition device and a control method thereof, and relates to the technical field of display. The organic vapor deposition device and the control method thereof aim at solving the problem of rapidly dredging a blocked nozzle during deposition. The organic vapor deposition device comprises an organic material supplying device, and a plurality of injecting heads which are connected to the organic material supplying device, wherein each injecting head comprises a pressurizing device, nozzles and lasers; the nozzles and the lasers are arranged at two opposite sides of the pressurizing device; the organic material supplying device is used for conveying output deposition air between the lasers and the nozzles; the lasers are used for emitting laser rays to the nozzles; and the pressurizing device is used for pressurizing the deposition air conveyed by the organic material supplying device and then injecting out the air through the nozzles.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an organic vapor deposition device and a control method thereof. Background technique [0002] Currently, optoelectronic devices made of organic materials are favored, and many of the materials used to make such devices are relatively cheap, so organic optoelectronic devices have a potential cost advantage over inorganic devices. In addition, the inherent properties of organic materials, such as their flexibility, can make them well suited for specific applications, such as fabrication on flexible substrates. Examples of organic optoelectronic devices include organic light-emitting diodes (Organic Light-Emitting Diode, OLED for short), organic phototransistors, organic photovoltaic cells, and organic photodetectors. For OLED devices, organic materials can have performance advantages over conventional materials. For example, the wavelength at which an organic emissive layer emi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/12C23C14/28C23C14/54
CPCC23C14/12C23C14/246C23C14/28C23C14/54
Inventor 井杨坤
Owner BOE TECH GRP CO LTD
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