Metal-semiconductor composite structure, an SPPs excitation mode and preparation method

Abstract

The invention discloses a metal-semiconductor composite structure, a SPPs excitation method and a preparation method. The structure sequentially comprises a transparent substrate, a multilayer dielectric film positioned on the transparent substrate, a semiconductor nanostructure positioned on the surface of the multilayer dielectric film, a transparent dielectric thin film for covering the semiconductor nanostructure, and a metal thin film positioned on the transparent dielectric thin film; the semiconductor nanostructure is used for forming defect of a nano scale on the surface of the metal thin film, and generating a fluorescence signal to excite the metal SPPs; the transparent substrate and the multi-layer dielectric film form a double-color-mirror substrate, and the double-color mirrorsubstrate is high in laser transmittance and high in fluorescence reflection; and the excitation method comprises the steps that the laser with relatively short wavelength penetrates through the double-color-mirror substrate and then is vertically incident on the semiconductor nanostructure, so as to excite the semiconductor nanostructure to generate a single-photon fluorescence signal with relatively long wavelength, and then the SPPs of the metal film is excited by the fluorescence signal. According to the invention, the excitation efficiency of the SPPs can be improved, and the detection difficulty and the detection cost of the SPPs can be lowered.

Description

technical field [0001] The invention belongs to the field of nanophotonics, and more specifically relates to a metal-semiconductor composite structure, an SPPs (Surface Plasmon Polaritons, surface plasmon polaritons) excitation method and a preparation method of the composite structure. Background technique [0002] Surface plasmon polaritons (Surface Plasmon Polaritions, SPPs) refer to the collective oscillation of free electrons on the surface of metals and other materials. It is a non-radiative electromagnetic wave propagating along the metal surface, which has good near-field energy localization and sub-wavelength spatial resolution. Metal surface plasmons are widely used in near-field local enhancement and breaking through the optical diffraction limit. Surface plasmons can be excited by electrons or photons. Compared with electronic excitation, optical excitation is more gentle and friendly to the environment, so it is widely used. [0003] When using optical means t...

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Problems solved by technology

[0005] In view of the defects and improvement needs of the prior art, the present invention provides a metal-semiconductor composite structure, SPPs excitation method and preparation method, aiming to solve the problem of low excitation efficiency in the existing SPPs excitation technology

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