A manufacturing method of an economical high-precision surface-enhanced Raman active substrate based on high-dielectric materials

Abstract

The invention relates to a manufacturing method of an economical high-precision surface-enhanced Raman active substrate based on high-dielectric materials, including the preparation of noble metal nano-islands, the deposition of high-dielectric nano-materials, HF and H 2 o 2 Three steps such as steam etching of the mixed solution, artificially controlling the scale of the noble metal nano-islands by magnetron sputtering and annealing, and then depositing high dielectric nanomaterials on the noble metal nano-islands by simple magnetron sputtering coating method, and then Take HF and H 2 o 2 The vapor of the mixed solution etches the sample to finally obtain. The method of the invention has good economy, high degree of standardization, strong Raman enhancement ability and identification ability, high reliability and good stability.

Description

technical field [0001] The invention relates to the field of physical and chemical detection, in particular to a method for manufacturing an economical high-precision surface-enhanced Raman active substrate of high dielectric material. Background technique [0002] The excitation of surface plasmons induced by noble metal nanostructures can provide strong Raman enhancement. Based on this characteristic of noble metal nanostructures, many surface-enhanced Raman scattering substrates have been developed. For example, the local surface enhancement effect based on discretized noble metal nanoparticles can achieve strong Raman enhancement, but the repeatability needs to be improved. The substrate structure prepared by complex methods such as focused ion beam etching, electron beam etching or template etching has a regular and ordered structure, and the Raman enhancement effect is very significant and repeatable, but the preparation cost is high and the instrument operation is com...

AI Technical Summary

Problems solved by technology

By adsorbing noble metal nanoparticles or self-assembled noble metal nanoparticles on the dielectric sphere array or self-assembling noble metal nanoparticles on the noble metal-covered dielectric sphere array, the intensity of the Raman signal of the molecules adsorbed on these structures can be compared with that of Compared with the noble metal thin film, it has been improved to a great extent, but the above structure still has the disadvantages of high cost, complicated preparation process, and the enhancement effect needs to be strengthened.

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