Method for preparing ultra-high-purity volatile rare earth cerium chelate
A chelate, high-purity technology, applied in the field of CVD, can solve the problems of difficult separation and purification, low yield, and difficulty in preparing β-diketone rare earth cerium, so as to improve purity, high yield, control the introduction of impurities and side effects The effect of the reaction
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[0047] Rare earth cerium raw material processing:
[0048] The purity of Ce(NO 3 ) 3 Raw materials are processed by ion exchange method to obtain high purity CeO 2 Raw material (relative purity> 5N), the ICP-MS analysis results of the treated cerium raw materials are as follows:
[0049]
[0050]
[0051] Dione ligand treatment:
[0052] Take the commercially available analytically pure 2,2,6,6-tetramethyl-3,5-heptanedione for distillation, collect the middle distillate, the color of the obtained ligand is colorless, GC-MS analysis, after processing 2, 2,6,6-Tetramethyl-3,5-heptanedione content> 99%, ICP-MS analysis showed that the content of Fe in the ligand was reduced from 154.9ppb to 60ppb, and the content of Mg was reduced from 137ppb to <10ppb.
[0053] Preparation of high purity cerium chelate (tetramethyl-2,2,6,6-tetramethyl-3,5-heptanedione cerium chelate) 1:
[0054] ①Take 7.45g of CeO obtained after treatment 2 In the beaker, then add 1M treated HNO 3 10ml, stir overnight an...
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