Equipment water supply temperature control device and control method

Abstract

The invention relates to a device water supply temperature control apparatus and a control method. The apparatus comprises a water supply unit for providing cooling water; a temperature control unit for detecting the temperature of the cooling water provided by the water supply unit, and modulating the temperature according to the water demand of a water equipment unit to provide circuit water ofprecise temperature control for the water equipment unit; and a mixed flow temperature homogenizing unit disposed between the water supply unit and the temperature control unit for homogenizing the cooling water provided by the water supply unit. According to the invention, the influence of temperature sudden changes as an external disturbance factor on the heat exchange process of the temperaturecontrol unit is avoided by the connection of the mixed flow temperature homogenizing unit in the case that a facility system is not good enough, such that the temperature control precision of the temperature control unit is ensured to improve the adaptability of the temperature control unit to harsh facility conditions.

Description

technical field [0001] The invention relates to industrial equipment cooling, in particular to an equipment water supply temperature control device and a control method. Background technique [0002] General industrial equipment will generate a lot of heat during the working process. In order to ensure the normal and continuous operation of industrial equipment, it is often necessary to use Fab cooling water to take away the heat. [0003] Since conventional industrial equipment generally does not have high requirements for the stability of Fab cooling water, most of the chillers manufactured and sold on the market are relatively simple. In most cases, they are only equipped with compressors with similar cooling power according to the heat dissipation requirements of customers. And simple control algorithm, the temperature stability of the final output PCW (process cooling water system, English full name: Processing Cooling Water) is poor, especially at the moment of cooling...

AI Technical Summary

Problems solved by technology

according to figure 1 It can be seen from the two temperature curves of the factory cooling water and circulating water that if the PCW temperature performance output by the chiller 1 is poor, each sudden temperature change will affect the heat exchange process of the temperature control unit 2 as an external disturbance factor. Then affect the performance of circulating water and air bath, and finally affect the exposure of exposure unit 3

[0005] With the continuous improvement of the exposure precision of lithography machines, the requirements for the temperature control precision of the objective lens are also getting higher and higher. At this time, the temperature control unit needs to further increase the temperature requirements of the Fab cooling water, and most Fab factories do not have very good PCW circulation system, but using industrial chillers as PCW generating equipment, it is difficult to meet the stability requirements of the temperature control unit for PCW

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