Semi-closed constant-pressure dual-frequency large area glow discharge experimental device

Abstract

The invention discloses a semi-closed constant-pressure dual-frequency large area glow discharge experimental device comprising a quartz glass cylinder, sealing plates, electrodes and a connecting post. The upper and lower sealing plates are connected and fixed through supporting columns and fixing bolts. The middle position between the upper and lower sealing plates is provided with the electrodes, and the electrodes are sealed through the quartz glass cylinder. The upper part of one side of the quartz glass cylinder is provided with a gas inlet, and different discharge gases are piped in through the gas inlet. The lower part of the other side of the quartz glass cylinder is provided with a gas outlet. The electrodes are connected with an external plasma power supply through the upper connecting post. The plasma ignition voltage can be significantly reduced, the device can be used for plasma discharge of toxic and hazardous gases because of the semi-closed environment, and the doubleelectrodes can be driven by dual power supplies of different frequency combinations so that large plasma density can be acquired and the range of application is wide.

Description

technical field [0001] The invention relates to the technical field of atmospheric pressure plasma, in particular to a semi-enclosed atmospheric pressure dual-frequency large-area glow discharge experimental device. Background technique [0002] Atmospheric pressure glow discharge plasma devices have attracted increasing attention because they do not require vacuum equipment, are relatively low in cost, and have wide application prospects. And other advantages, but also has the low temperature characteristics of low pressure glow discharge discharge plasma. [0003] However, the current atmospheric pressure glow discharge plasma device cannot satisfy the large area and high density of glow plasma at the same time. At the same time, due to the atmospheric environment where the discharge occurs, it cannot be used for the plasma discharge process of toxic and harmful gases, resulting in Limitations of device application. Contents of the invention [0004] The object of the ...

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Problems solved by technology

[0003] However, the current atmospheric pressure glow discharge plasma device cannot satisfy the large area and high density of glow plasma at the same time, and at the same time, due to the atmospheric environment where the discharge occurs, it cannot be used for the plasma discharge process of toxic and harmful gases, resulting in Device Application Limitations

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