Method for preparing positive electrode of metal oxide
A technology of oxides and metals, applied in the field of preparing metal oxide cathodes, can solve the problems of complexity, many preparation steps, and long process, and achieve good uniformity
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[0030] In order to make the purpose of the present invention, technical solutions and advantages clearer, the present invention will be described in further detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0031] Please refer to figure 1 , The first embodiment of the present invention provides a multivariate magnetron sputtering device 10, the multivariate magnetron sputtering device 10 includes a plurality of target positions 11, a plurality of guide tubes 13, a magnetron sputtering chamber 15 and a substrate The stage 17 , the plurality of target positions 11 , the plurality of guide tubes 13 and the substrate stage 17 are all accommodated in the magnetron sputtering chamber 15 . The plurality of target positions 11 are used to install a variety of targets, and one end of the plurali...
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