Oxidization fluid for reducing content of highly oxidizable substance (SO2) in electronic-grade sulfuric acid and preparation method of oxidization fluid
An oxidizing solution and electronic-grade technology, which is applied in the field of electronic chemicals, can solve the problems of high content of easy oxides, and achieve the effects of improving stability, reducing content, and increasing sales.
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Embodiment 1
[0020] An oxidizing solution for reducing the content of easily oxidized (SO2) in electronic-grade sulfuric acid, prepared by the following method:
[0021] (1) According to the mass percentage of each raw material: ultrapure water 90%, electronic grade sulfuric acid 1%, 30% UPSS grade hydrogen peroxide 9%, select each ultrapure reagent.
[0022] (2) Place the container containing ultrapure water in an ice water bath, slowly add 1% electronic grade sulfuric acid by mass to the ultrapure water, and mix well.
[0023] (3) After the solution is cooled, add 30% UPSS grade hydrogen peroxide with a mass ratio of 9% to the solution, and mix it evenly to form the oxidation solution.
Embodiment 2
[0025] A method for reducing easily oxidized (SO) in electronic grade sulfuric acid 2 ) content of the oxidation solution, prepared by the following method:
[0026] (1) According to the mass percentage of each raw material: ultrapure water 50%, electronic grade sulfuric acid 30%, 30% UPSS grade hydrogen peroxide 20%, select each ultrapure reagent.
[0027] (2) Place the container containing ultrapure water in an ice water bath, slowly add 30% electronic grade sulfuric acid by mass to the ultrapure water, and mix well.
[0028] (3) After the solution is cooled, add 30% UPSS grade hydrogen peroxide with a mass ratio of 20% to the solution, and mix well to form the oxidizing solution.
Embodiment 3
[0030] The storage capacity of electronic grade sulfuric acid in the electronic grade sulfuric acid storage tank is 20 m 3 , the acid temperature is 60°C, after the circulation is uniform, sampling test is carried out, and the easily oxidized (SO 2 ) content is 4.6 ppm. Pour 3 L of the oxidizing solution prepared in Example 1 into the electronic-grade sulfuric acid storage tank through a metering pump, circulate the electronic-grade sulfuric acid in the storage tank for 12 h with a liner circulation pump, and then take a sample of the recycled electronic-grade sulfuric acid Carry out a test for easy oxide content. The test results show that the content of easy oxides is 0.32 ppm, and the metal ion indicators are all less than 500ppt. It shows that the oxidizing solution can reduce the easily oxidized (SO 2 ) content has obvious effect and will not introduce other impurities.
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