Oxidization fluid for reducing content of highly oxidizable substance (SO2) in electronic-grade sulfuric acid and preparation method of oxidization fluid

An oxidizing solution and electronic-grade technology, which is applied in the field of electronic chemicals, can solve the problems of high content of easy oxides, and achieve the effects of improving stability, reducing content, and increasing sales.

Pending Publication Date: 2018-07-13
湖北兴福电子材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims at easily oxidized (SO 2 ) content is too high, the purpose is to provide a way to add ...

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] An oxidizing solution for reducing the content of easily oxidized (SO2) in electronic-grade sulfuric acid, prepared by the following method:

[0021] (1) According to the mass percentage of each raw material: ultrapure water 90%, electronic grade sulfuric acid 1%, 30% UPSS grade hydrogen peroxide 9%, select each ultrapure reagent.

[0022] (2) Place the container containing ultrapure water in an ice water bath, slowly add 1% electronic grade sulfuric acid by mass to the ultrapure water, and mix well.

[0023] (3) After the solution is cooled, add 30% UPSS grade hydrogen peroxide with a mass ratio of 9% to the solution, and mix it evenly to form the oxidation solution.

Embodiment 2

[0025] A method for reducing easily oxidized (SO) in electronic grade sulfuric acid 2 ) content of the oxidation solution, prepared by the following method:

[0026] (1) According to the mass percentage of each raw material: ultrapure water 50%, electronic grade sulfuric acid 30%, 30% UPSS grade hydrogen peroxide 20%, select each ultrapure reagent.

[0027] (2) Place the container containing ultrapure water in an ice water bath, slowly add 30% electronic grade sulfuric acid by mass to the ultrapure water, and mix well.

[0028] (3) After the solution is cooled, add 30% UPSS grade hydrogen peroxide with a mass ratio of 20% to the solution, and mix well to form the oxidizing solution.

Embodiment 3

[0030] The storage capacity of electronic grade sulfuric acid in the electronic grade sulfuric acid storage tank is 20 m 3 , the acid temperature is 60°C, after the circulation is uniform, sampling test is carried out, and the easily oxidized (SO 2 ) content is 4.6 ppm. Pour 3 L of the oxidizing solution prepared in Example 1 into the electronic-grade sulfuric acid storage tank through a metering pump, circulate the electronic-grade sulfuric acid in the storage tank for 12 h with a liner circulation pump, and then take a sample of the recycled electronic-grade sulfuric acid Carry out a test for easy oxide content. The test results show that the content of easy oxides is 0.32 ppm, and the metal ion indicators are all less than 500ppt. It shows that the oxidizing solution can reduce the easily oxidized (SO 2 ) content has obvious effect and will not introduce other impurities.

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Abstract

The invention relates to an oxidization fluid for reducing the content of a highly oxidizable substance (SO2) in electronic-grade sulfuric acid and a preparation method of the oxidization fluid. The oxidization fluid for reducing the content of the highly oxidizable substance (SO2) in the electronic-grade sulfuric acid comprises the following main components: hydrogen peroxide which accounts for 1-30% of the total weight of the oxidization fluid, an inorganic acid which accounts for 0.01-30% of the total weight of the oxidization fluid, and the balance of water. The content of the highly oxidizable substance (SO2) in the electronic-grade sulfuric acid is an important index which can directly affect the quality of electronic-grade sulfuric acid, and by adopting the hydrogen peroxide systemoxidization fluid, the content of the highly oxidizable substance (SO2) in the electronic-grade sulfuric acid can be reduced; in addition, as the reaction generation substance is sulfuric acid, no other impurity can be introduced.

Description

technical field [0001] The invention belongs to the field of electronic chemicals, in particular to a method for reducing easily oxidized (SO 2 ) content of the oxidation solution and its preparation method. Background technique [0002] Electronic grade sulfuric acid, also known as ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent. Mainly used for silicon wafer cleaning, photolithography, corrosion, printed circuit board corrosion and electroplating cleaning. Electronic grade sulfuric acid has been used for cleaning silicon wafers for over 40 years. It is an indispensable key basic chemical reagent in the semiconductor industry, and it is also one of the eight most commonly used chemical reagents. [0003] From the birth of the first transistor in Bell Laboratories on December 23, 1947 to the present, semiconductor technology has experienced 70 years of rapid development following Moore's Law, with a generation of progress every two years, and the size ...

Claims

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Application Information

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IPC IPC(8): C01B17/90C01B17/74
CPCC01B17/74C01B17/90C01P2006/80
Inventor 李少平杨着冯凯廖义郭岚峰陈辉刚姜飞张永萍
Owner 湖北兴福电子材料股份有限公司
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