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Coating method for enhancing environmental stability of multilayered laser film

An environmental stability, laser thin film technology, applied in optical components, coatings, optics, etc., can solve the problems of low anti-laser damage threshold, low anti-laser damage threshold, film cracking, thin film element failure, etc., to improve environmental stability Sexual, targeted and efficient effects

Active Publication Date: 2018-07-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

At present, ion beam assisted deposition technology or ion beam sputtering deposition technology is often used to prepare optical thin film elements with high density. Although the environmental stability of the prepared thin film elements has been improved, the stress is relatively large. For thin-film components, it is very easy to cause cracks in the film layer and lead to failure of the thin-film components; and its anti-laser damage threshold is generally lower than that of thin-film components prepared by electron beam evaporation technology.

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  • Coating method for enhancing environmental stability of multilayered laser film
  • Coating method for enhancing environmental stability of multilayered laser film

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.

[0024] see first figure 1 , figure 1 It is a schematic diagram of the film system of the multilayer high reflection film prepared by conventional electron beam evaporation technology and the method of the present invention. The embodiment is based on the high refractive index material as HfO 2 , the low refractive index material is SiO 2 , the film system design is respectively: the multi-layer high reflection film of S | M B | A, S | HL) 12 H, B=N=4L, this technique comprises the following steps:

[0025] 1) Film system design:

[0026] According to the requirements of spectral performance: 0°R≥99.5%@1064nm, the designed film system is: S|4L(HL) 12 H 4L|A, where L represents the low refractive index material SiO 2 , H stands for high refractive index material HfO 2 , 4L layer is the protective layer;

[0027] 2) Substrate cleaning: the substra...

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Abstract

The invention relates to a coating method for enhancing environmental stability of a multilayered laser film. The method is substantially a technology of combining an ion beam assisted deposition technology based on an electronic beam evaporation technology. According to a designed film system, multilayer films except the outermost layer are deposited by means of the electronic beam evaporation technology to acquire a high anti-laser-damaged threshold value; and the outermost layer is deposited by means of the ion beam assisted deposition technology to obtain a compact vapor barrier layer to prevent water molecules from coming in and going out of the surface of a multilayered film element quickly. The method provided by the invention enhances the environmental stability of the multilayeredfilm element while the multilayered film element prepared by means of the electronic beam evaporation technology can keep the high anti-laser-damaged threshold value.

Description

technical field [0001] The invention belongs to the technical field of optical thin films, in particular to a coating method for improving the environmental stability of a multilayer laser thin film element. Background technique [0002] Electron beam evaporation deposition technology is widely used in the preparation of laser thin film components because it is easy to obtain a high laser damage threshold and is easy to expand for the preparation of large-sized thin film components. However, the performance changes of large-aperture laser thin film components prepared by electron beam deposition technology in different environments, such as changes in spectral properties and transmission wavefront quality, are one of the main reasons that affect the stable operation of laser systems. For example, during the operation of large-scale high-power laser devices such as Shenguang series devices in my country and the National Ignition Facility (NIF) in the United States, problems s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/46C23C14/08C23C14/10G02B1/14
CPCC23C14/083C23C14/10C23C14/30C23C14/46G02B1/14
Inventor 朱美萍曾婷婷邵建达易葵尹超奕许诺孙建李静平王胭脂王建国
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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