MEMS accelerometer
An accelerometer and area technology, applied in the direction of measuring acceleration, multi-dimensional acceleration measurement, velocity/acceleration/shock measurement, etc., can solve problems such as stress warping, MEMS structural plane and fixed electrode plane are not parallel, to reduce sensitivity, Effects of avoiding sensor damage and increasing torque
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[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] The MEMS accelerometer of the present invention mainly improves the acceleration detection of Z-axis input. One is to divide the detection mass into the first mass block and the second mass block, and the Z-axis detection capacitor group composed of the two mass blocks and the fixed electrodes is in the plane of the MEMS structure layer relative to the anchor area in the X-axis or Y The distribution distance in one direction of the axis is equivalent, t...
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