Ag/AgCl reference electrode (RE) and manufacturing method thereof

Abstract

The invention provides Ag / AgCl RE and a manufacturing method of Ag / AgCl RE. A platinum electrode lead (4) is arranged on a glass substrate (5) of Ag / AgCl RE, and an Ag / AgCl electrode layer (2) is arranged at the tail end of Ag / AgCl RE; the glass substrate (5) is covered with a silicon substrate (1) by bonding with the glass substrate; a cavity opening downwards and containing at least the Ag / AgClelectrode layer (2) is arranged on the silicon substrate (1), and the cavity and the glass substrate (5) form a liquid storage chamber (7) used for storing a potassium chloride saturated solution, multiple nanometer-sized tapered micropores with large outer wall apertures and small inner wall apertures subjected to corrosion etching by using a wet method are formed in the top wall of the liquid storage chamber (7) to form an array of the tapered micropores (3), and each tapered micropore (3) is taken as a nanochannel for ion exchange between the two parts by contacting with an external to-be-tested object; a liquid injection hole (12) is formed in the glass substrate (5), and provided with a sealant (8); according to the invention, the ion exchange rate is greatly reduced by a nano-pore array, so that the service time of the potassium chloride saturated solution and the service life of RE can be obviously improved, the manufacturing method of Ag / AgCl RE is based on a micro-nano processing technology, and Ag / AgCl RE can be manufactured through integration with other electrodes to realize the miniaturization of a whole detection sensor.

Description

technical field [0001] The invention relates to an Ag / AgCl reference electrode and a manufacturing method thereof, belonging to the technical field of sensors. Background technique [0002] Reference Electrode (Reference Electrode, referred to as RE) is an electrode used as a reference comparison when measuring various electrode potentials. The electrode to be measured and a reference electrode with an accurately known electrode potential value constitute a battery, and the electromotive force value of the battery can be measured. Calculate the electrode potential of the measured electrode. Generally, a slightly soluble salt electrode is used as a reference electrode. Commonly used reference electrodes include calomel electrodes and silver-silver chloride electrodes. In addition, there are copper-copper sulfate electrodes, quinhydrone electrodes, and solid reference electrodes. [0003] The potential of the reference electrode is constant, and its main function is to measur...

AI Technical Summary

Problems solved by technology

However, in the field of sensors, it can only be used in combination with other electrodes, and cannot be integrated with other electrodes on a sensor chip, which limits its application in sensors.

Many research institutions have developed miniature Ag / AgCl all-solid-state reference electrodes based on micro-nano manufacturing technology, but because the potassium chloride saturated solution required by the electrode has a short storage time on the electrode surface, the service life of the electrode is not long. Can not meet the requirements of long-term continuous work of the sensor

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