Multispectral optical technology fused temperature measuring device
A temperature measurement device and multi-spectral technology, applied in the field of optical temperature measurement, can solve the problems of high price, low specificity and temperature rise sensitivity, long time, etc., and achieve the effect of improving stability, reducing error and improving accuracy
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[0020] like figure 1 As shown, in this embodiment, the multispectral tunable laser 1 is used as the output end of the light source, and the output parallel beam passes through the variable filter 2 to attenuate the energy, and then passes through the beam shaper 4 to shape and expand the beam; then The beam is incident to the beam splitter 4 to split the beam, a part of the light is used as the reference light of the reference arm of the optical coherent microscope module, and a part of the light passes through the focusing lens 7, and then enters the collimated beam expansion through the deep hole diaphragm 8 The lens group 9, after expanding the beam, is incident on the high-speed scanning galvanometer 10, and then through the large-aperture microscopic objective lens 11, the beam is focused and passed through the water tank 14, and the focused spot is irradiated to the sample 12; then the high-precision temperature heating controller 13 starts Slowly warm the water in the w...
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