Intelligent smell array sensor and manufacturing method

Abstract

The invention discloses an intelligent smell array sensor. The intelligent smell array sensor consists of a chip, wherein an electric insulating layer is arranged on the upper surface of the chip; heaters and a temperature measurer are arranged in the electric insulating layer; the temperature measurer is arranged between the heaters; smell sensor film layers of different types are arranged on theupper surface of the electric insulating layer; the smell sensor film layers of different types are arranged in the form of an array; smell sensors of different types are embedded into the smell sensor film layer; sensor electrodes are arranged on the smell sensors of different types; and a plurality of electrode wiring posts are arranged at the two sides of the upper surface of the electric insulating layer. The sensor takes a micro electronic technique as a main body, so that the sensors are arranged on the same chip in the form of array; through the film technique, the sensors enter nano-scale, and the sensors are manufactured through the nanotechnology, so that the surface volume ratio is increased to the greatest extent, and sensitivity of the sensor is excellent in aspect of quality.

Description

technical field [0001] The invention relates to the technical field of odor sensors, in particular to an intelligent olfactory array sensor and a manufacturing method. Background technique [0002] So far, there are four conventional technologies involved in gas detection: 1. Metal Oxide Semiconductor (MOS) gas sensors, which are sensitive to many reducing gases, but the disadvantage is poor selectivity; 2. Catalytic combustion, which uses catalysts to assist combustion to generate The principle that heat increases the resistance of the sensor has the disadvantage that it only responds to flammable gases and has low sensitivity. 3. Electrochemical sensors have a certain selective response to some important gases, but the disadvantages are short life and poor stability. 4. Optical gas sensor: Use part of the gas to have an absorption spectrum in the infrared region, and use an infrared light source generator, filter, and infrared detector to make a gas sensor with good selec...

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Problems solved by technology

[0002] So far, there are four conventional technologies involved in gas detection: 1. Metal Oxide Semiconductor (MOS) gas sensors, which are sensitive to many reducing gases, but the disadvantage is poor selectivity; 2. Catalytic combustion, which uses catalysts to assist combustion to generate The principle that heat increases the resistance of the sensor, the disadvantage is that it only responds to flammable gases and has low sensitivity

3. Electrochemical sensors have a certain selective response to some important gases, but the disadvantages are short life and poor stability

4. Optical gas sensor: Use part of the gas to have an absorption spectrum in the infrared region, and use an infrared light source generator, filter, and infrared detector to make a gas sensor with good selectivity. The disadvantage is that the instrument is complex and itself is equivalent to a equipment, expensive

In addition, all gas sensors currently only include the sensor itself and the heater, without a temperature detector, without a temperature measurement function, and cannot perform precise temperature control, resulting in low detection accuracy of the gas sensor

[0005] At present, the gas sensor structure is not a thin film, and it cannot achieve mass production with high sensitivity, high consistency, and high stability. This is the background situation of a single gas sensor in the world so far.

[0006] Olfactory sensing at least requires an array of multiple odor sensors. At present, there is no sensor that can detect odors in the world, and there is no array sensor with multiple odor types on a chip, that is, it is impossible to achieve a sense of smell similar to the human nose. Solutions to electrical property conversion and detection

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