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Grinding device

A technology for grinding and grinding surfaces, which can be used in grinding devices, parts of grinding machine tools, grinding/polishing equipment, etc., and can solve problems such as the end of grinding of plate-shaped workpieces

Active Publication Date: 2021-05-25
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, there is a problem that when grinding a different type of plate-shaped workpiece while maintaining the state in which the reference value for grinding a plate-shaped workpiece before the type is changed is maintained in the grinding device, even if the The state of not reaching the specified thickness will also end the grinding of the plate-shaped workpiece

Method used

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Examples

Experimental program
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Effect test

Embodiment Construction

[0023] figure 1 The shown grinding device 1 is an example of a grinding device capable of grinding a plate-shaped workpiece having a plurality of electrodes inside. The grinding apparatus 1 has: an apparatus base 100 extending in the Y-axis direction; and a column 101 erected on the rear side of the apparatus base 100 in the Y-axis direction. On the device base 100, there are a holding table 2 having a holding surface 2a for holding a plate-shaped workpiece having a plurality of electrodes inside, and a holding table rotation unit 4, which rotates. The unit 4 rotates the holding table 2 about the center of the holding table 2 as an axis. The surrounding of the holding surface 2a of the holding table 2 is surrounded by the frame body 3, and the upper surface of the frame body 3 becomes a reference surface 3a having the same height as the holding surface 2a. The periphery of the holding table 2 is covered with a cover 5 and is movable in the Y-axis direction by a movement unit...

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Abstract

A grinding device is provided that grinds until it reaches a predetermined thickness even if the type of the plate-shaped workpiece to be ground is changed. The grinding device (1) has: a grinding unit (10) for grinding a plate-shaped workpiece (W) by rotating a grinding wheel (15) using a grinding tool rotation unit (11); and a judging unit (30) , it judges that the electrode (We) is exposed on the surface to be ground (Wa), and the judging unit has: a storage unit (31), which loads the current when the electrode is not ground by the grinding tool (16) The load current value detected by the value detection unit (112) is stored; the setting part (32) sets the value obtained by multiplying the load current value by a preset coefficient as the electrode when the surface to be ground is exposed. A reference load current value; and a judging section (33), which judges that the electrode is exposed on the surface to be ground when the load current value in grinding reaches the reference load current value, and is set according to the type of the plate-shaped workpiece and the grinding wheel The base load current value reliably grinds a plate-like workpiece until the electrode is exposed on the ground surface.

Description

technical field [0001] The present invention relates to a grinding device for grinding workpieces such as plate-like workpieces. Background technique [0002] A processing device for grinding plate-shaped workpieces has at least: a holding table, which holds the plate-shaped workpiece; a grinding unit, which has a grinding wheel on which a grinding wheel is fixed in a ring a motor, which rotates the grinding wheel; and a processing feed unit, which feeds the grinding unit in the direction of approaching and moving away from the plate-shaped workpiece held on the holding table, the processing device on one side Grinding is performed while pressing a plate-shaped workpiece with a grinding tool. [0003] When a plate-shaped workpiece with an electrode inside is ground in a processing device and the electrode is exposed on the surface to be ground, when the grinding wheel reaches the electrode during the grinding process, the motor that rotates the grinding wheel The load curr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B49/16H01L21/304B24B37/34B24B49/10
Inventor 松原壮一
Owner DISCO CORP
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