High-efficiency purifying device and process for fluorine

Abstract

The invention discloses a high-efficiency purifying device and a high-efficiency purifying process for fluorine. The high-efficiency purifying device for the fluorine comprises a feeding cabin, a spiral feeder, a fluorine pressurizing pump, a fluorine jet head, a conical reactor, filters and a spiral regenerative reactor, and is characterized in that after being pressurized,the fluorine is jetted to entrain a powder adsorbent through the jet head; the fluorine and the powder adsorbent form a gas / solid turbulent cluster; and the powder adsorbent adsorbs hydrogen fluoride entrained in the fluorine. A pure product is obtained after dust in purified fluorine is filtered through the filters. The adsorbent sinks to the bottom of the reactor, and enters the spiral regenerative reactor for heating and regenerating through an airtight material cabin. The hydrogen fluoride is desorbed from the adsorbent, is attracted through an external negative pressure device, is filtered and gathered through a plurality of gas branch pipe filters, and flows out from the spiral regenerative reactor. The regenerated adsorbent is transmitted through an external device and is returned to the material cabin for recycling. The high-efficiency purifying device and the high-efficiency purifying process for the fluorine realize high-efficiency purifying of industrial fluorine, and have the advantages of reliable process, stable product quality and the like.

Description

technical field [0001] The invention relates to a high-efficiency purification device and process for fluorine gas. Background technique [0002] Fluorine (F 2 ) is the most active substance discovered so far by human beings, with extremely strong reactivity. The production of fluorine-containing chemicals with fluorine gas has many excellent properties and is widely used in the fields of national defense, information, electronics and chemical industry. For example, it is used as an etchant or cleaning agent in the manufacture of semiconductor devices, thin film transistors, purification of nuclear fuel in the nuclear power industry, synthesis of insulating gas sulfur hexafluoride in the power industry, synthesis of lithium hexafluorophosphate, an important raw material for lithium batteries in the new energy industry, etc. Therefore, the research and development of fluorine-related technologies is of great significance. [0003] Known methods for preparing fluorine gas i...

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Problems solved by technology

[0011] In actual production, the common problem in the adsorption method is: when the fluorine gas is purified by the adsorption method, since the adsorbent is stacked in the adsorption device (usually the adsorption tower), the place where the fluorine gas and the adsorbent come into contact (usually the adsorption tower inlet), often due to the expansion of hydrogen fluoride gas absorbed by this part of the adsorbent, it is easy to block the gas flow channel of the adsorption device, which seriously affects the normal production process

This approach does expand the area where the adsorbent is in contact with the gas, but the hidden worry is: the more "porous" and the larger the "mesh", the more fine dust the adsorbent will be carried away by the airflow, and the fluorine gas will be mixed with it. Hydrogen fluoride is removed, but the inclusion of tiny fine dust has increased

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