Mask frame, mask and production method thereof

Abstract

The invention discloses a mask frame, a mask and a production method thereof. The mask frame comprises a frame main body, fixing parts, extrusion devices and pressure sensing devices, wherein the fixing parts are located in two opposite sides of the frame main body; the extrusion devices are used for passing through the frame main body and applying pressure to the fixing parts; the pressure sensing devices are used for sensing pressure applied to the fixing parts by the extrusion devices. According to the mask frame, the mask and the production method thereof, the extrusion devices are used for applying pressure to the fixing parts, so that the pressure is applied to the mask frame; the pressure sensing devices are used for sensing the pressure applied to the fixing parts by the extrusion devices, so that the pressure applied by the extrusion devices can be adjusted, and then the proper pressure can be applied to the fixing parts in different positions; the problem of difference or positional deviation of pixel images on mask bars can be avoided, so that the accuracy of the formed mask patterns can be improved.

Description

technical field [0001] The invention relates to the field of mask technology, in particular to a mask frame, a mask and a manufacturing method thereof. Background technique [0002] At present, the pixels of Active Matrix Driving Organic Light Emitting Diode (AMOLED) are manufactured through a vacuum evaporation process using a fine metal mask (FMM), and the fine metal mask The manufacturing process of the plate is very difficult, resulting in a low yield rate of AMOLED products. [0003] During the manufacturing process of the mask plate, the mask strip needs to be welded on the mask frame. The inventor found the following problems in the prior art: after the soldering, the pixel images on the mask strips may have differences or positional deviations, which will lead to abnormal display of AMOLED products; moreover, after the extrusion force is withdrawn, The mask frame will produce an outward elastic force equal to the extrusion force, which will also cause the position ...

AI Technical Summary

Problems solved by technology

[0004] In view of this, the object of the present invention is to propose a mask frame, a mask plate and a manufacturing method thereof, so as to solve the technical problem of the opening position deviation of the mask plate during opening and use

Images