Transition metal boride and metal composite target material, coating equipment and application thereof

A transition metal and metal composite technology, which is applied in metal material coating process, sputtering coating, ion implantation coating and other directions, can solve the problem of difficult and precise control of metal content, save installation time, good controllability, Actionable effect

Pending Publication Date: 2017-11-10
SHENZHEN INST OF ADVANCED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The first object of the present invention is to provide a kind of transition metal boride-metal composite target material, to ease the process of preparing the transition metal boride-metal composite coating in the prior art, the transition metal boride-metal composite coating The technical problem that the metal content is difficult to control precisely

Method used

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  • Transition metal boride and metal composite target material, coating equipment and application thereof
  • Transition metal boride and metal composite target material, coating equipment and application thereof
  • Transition metal boride and metal composite target material, coating equipment and application thereof

Examples

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Embodiment 1

[0034] Such as figure 1 and figure 2 As shown, this embodiment is a transition metal boride-metal composite target, including a transition metal boride substrate 10 and a metal piece 20 fixedly connected to the transition metal boride substrate 10, and the working surface of the transition metal boride substrate 10 It is co-surface with the working surface of the metal part 20 .

[0035] The metal piece 20 and the transition metal boride substrate 10 in the present invention are fixed together, and the working surfaces of the two are coplanar, which ensures that the transition metal boride and the metal can enter the composite coating at the same time. According to the mass ratio of the metal and the transition metal boride in the composite coating, the area ratio of the working surface of the metal piece 20 and the transition metal boride matrix 10 is designed, so as to achieve the purpose of accurately controlling the metal content in the composite coating, and make the tr...

Embodiment 2

[0047] Such as image 3 As shown, this embodiment is a transition metal boride-metal composite target. The difference from Embodiment 1 is that the metal piece 20 in this embodiment is fixed on the outer peripheral surface of the transition metal boride matrix 10 . All the other are identical with embodiment 1. Specifically, the metal piece 20 is fixedly connected to the transition metal boride substrate 10 by welding, clamping or screwing. Wherein, the metal piece 20 is a ring structure, sheathed on the outer peripheral surface of the transition metal boride matrix 10 , and the inner diameter of the metal piece 20 matches the outer diameter of the transition metal boride collective 10 .

Embodiment 3

[0049] This embodiment is a transition metal boride-metal composite target. The difference from Example 1 is that in this example, the transition metal boride substrate 10 is selected from the hard phase TiB 2 , the metal part 20 is made of Cu metal part 20, and the combination of the two forms TiB 2 -Cu composite target. The atomic content of Cu is 5 at.%.

[0050] TiB in this example 2 -Cu composite target is designed according to the size of the corresponding target installation position in the coating equipment. where TiB 2 - The diameter of the thread size of the Cu composite target is 86mm, the pitch is 1mm, the thread depth is 8mm, the size of the deepest undercut of the thread is 1.5mm, and the diameter of the undercut is 83mm. TiB 2 - The height of the Cu composite target is 35mm, and the maximum diameter φ is 100mm. This ensures that TiB 2 -Cu composite target and the installation position of the target in the coating equipment are well matched. Cu metal par...

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Abstract

The invention provides a transition metal boride and metal composite target material, coating equipment and application thereof, relating to the technical field of the coating equipment. The transition metal boride and metal composite target material comprises a transition metal boride substrate and a metal piece, wherein the metal piece is fixedly connected with the transition metal boride substrate, and the working face of the transition metal boride substrate and the working face of the metal piece are coplanar surfaces. The transition metal boride and metal composite target material can ease the technical problem that the metal content is not easily precisely controlled when a composite coating is prepared.

Description

technical field [0001] The invention relates to the technical field of coating equipment, in particular to a transition metal boride-metal composite target, coating equipment and applications thereof. Background technique [0002] Boron is known as the vitamin of metal materials, mainly because boron has the chemical properties of both metals and nonmetals. It can not only combine with metals to form various borides, but also combine with nonmetals to form various borides. Therefore, in recent years, Transition metal borides are favored by many researchers. [0003] The transition metal boride-metal composite coating has many excellent comprehensive properties, such as high hardness, stiffness, wear resistance, electrical conductivity and thermal conductivity, etc., especially its high hardness, known as the second superhard materials. The transition metal boride-metal composite coating has the above-mentioned excellent physical and chemical properties, so the transition m...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0688C23C14/3407C23C14/35
Inventor 唐永炳陈光海蒋春磊
Owner SHENZHEN INST OF ADVANCED TECH
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