Fully integrated infrared gas sensor and its working method

Abstract

The invention discloses a fully-integrated infrared gas sensor and a working method thereof, which comprises a piezoelectric micropump layer, a porous layer, an optical cavity layer, a circuit layer, an infrared light source, an optical filter and an infrared sensing element, wherein the circuit layer is used for outputting a periodic voltage sequential control signal to the piezoelectric micropump layer so as to control the rising or pressing action of the piezoelectric micropump layer; when the piezoelectric micropump layer is pressed down and completely covers the pores in the porous layer, the circuit layer is also used for outputting a control signal to the infrared light source so that the infrared light source can emit infrared light; the optical filter is used for filtering infrared light of infrared characteristic absorption wave band of non-to-be-detected gas; the infrared sensing element is used for converting the infrared light, filtered by the optical filter and absorbed by to-be-detected gas, into an electrical signal, and the circuit layer is also used for calculating the converted electrical signal so as to obtain the concentration value of the to-be-detected gas. The invention further provides a working method of the infrared gas sensor.

Description

technical field [0001] The invention belongs to a gas sensor, in particular to a fully integrated infrared gas sensor based on an adjustable laser diode light source. Background technique [0002] Gas sensors are widely used in fields such as production site monitoring, gas pipeline network monitoring, and environmental monitoring. With the rapid development of emerging industries such as the Internet of Things and consumer electronics, people are increasingly concerned about the quality of the air environment, and the application demand for gas sensors is growing rapidly. A gas sensor is a device that converts information such as gas composition and concentration into electrical signals. Gas sensors mainly include semiconductor type, catalytic combustion type, and electrochemical type. This type of gas sensor has poor gas selectivity during use and cross-interference between different gases. The infrared gas sensor uses the principle of non-dispersive infrared (NDIR) to de...

AI Technical Summary

Problems solved by technology

However, the air inlet and outlet of the gas chamber in the fully integrated infrared gas sensor use natural diffusion. Due to the limited number of air holes, the sensor has a long measurement response time.

At the same time, the existence of air holes will cause light leakage during transmission and reduce the accuracy of the sensor

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