Microdrop ion sputtering technology and water turbine preparation method
A technology of ion sputtering and sputtering, which is applied in the direction of sputtering plating, ion implantation plating, metal material coating process, etc., and can solve the problems of deformation of the substrate to be sputtered, excessive particle size, large temperature difference on both sides, etc. , to achieve the effect of improving the protection effect, enhancing the binding force and ensuring the integrity
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Embodiment 1
[0031] This embodiment provides a droplet ion sputtering process, in which the substrate to be sputtered is manually polished and electrostatically removed, wherein the polishing time is 7 minutes, and the electrostatic dust removal time is 4 minutes.
[0032] Then put the prepared printing layer raw material into the accommodating cavity and heat the printing layer raw material, so that the solid printing layer raw material melts into a liquid printing layer liquid, and the specific heating temperature is 1200°C. The printing layer liquid is passed through the atomizing nozzle so that the printing layer liquid is atomized into droplets and sputtered on the surface of the substrate to be sputtered, wherein the particle size of the atomized droplets is 10 nanometers.
[0033] While sputtering the raw materials of the printing layer, the substrate to be sputtered is cooled, and cooling water is used to cool the temperature, and the flow rate of the cooling water is 25dm 3 / min. ...
Embodiment 2
[0037] This embodiment provides a droplet ion sputtering process, in which the substrate to be sputtered is manually polished and electrostatically removed, wherein the polishing time is 10 minutes, and the electrostatic dust removal time is 3 minutes.
[0038] Then put the prepared printing layer raw material into the accommodating cavity and heat the printing layer raw material, so that the solid printing layer raw material melts into a liquid printing layer liquid, and the specific heating temperature is 1400°C. The printing layer liquid is passed through the atomizing nozzle so that the printing layer liquid is atomized into droplets and sputtered on the surface of the substrate to be sputtered, wherein the particle size of the atomized droplets is 20 nanometers.
[0039] While sputtering the raw materials of the printing layer, the substrate to be sputtered is cooled, and the cooling water is used to cool down, and the flow rate of the cooling water is 50dm 3 / min. At th...
Embodiment 3
[0043] This embodiment provides a droplet ion sputtering process, in which the substrate to be sputtered is manually polished and electrostatically removed, wherein the polishing time is 5 minutes, and the electrostatic dust removal time is 5 minutes.
[0044] Then put the prepared printing layer raw material into the accommodating cavity and heat the printing layer raw material, so that the solid printing layer raw material melts into a liquid printing layer liquid, and the specific heating temperature is 1500°C. The printing layer liquid is passed through the atomizing nozzle so that the printing layer liquid is atomized into droplets and sputtered on the surface of the substrate to be sputtered, wherein the particle size of the atomized droplets is 15 nanometers.
[0045] While sputtering the raw material of the printing layer, the substrate to be sputtered is cooled, and the cooling water is used to cool down, and the flow rate of the cooling water is 20dm 3 / min. At the ...
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