MEMS chip
A chip and sensitive film technology, applied in the field of MEMS chips, can solve problems such as stress reduction and inability to fully release, and achieve the effect of improving service life and preventing distortion
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[0028] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
[0029] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.
[0030] Techniques and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques and devices should be considered part of the description.
[0031] In all examples shown and discussed herein, any specific values should be construed as illustrative only, and not as limiting. Therefore, other instances of the exemplary embodiment may have different values.
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