Porous array electromagnetic field reinforced SERS (surface enhanced raman scattering) device for detecting trace microcystic toxin and preparation method and detection method
A technology of microcystin and porous array, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of complicated microcystin detection operation, expensive sample pretreatment, difficult to realize in-situ monitoring of water body, etc., to achieve Trace molecular content and its surface-enhanced Raman scattering signal detection, the effect of weak Raman scattering signal enhancement
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[0029] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0030] 1. Preparation of porous array electromagnetic field-enhanced SERS devices:
[0031] like figure 1 Shown: The preparation of the porous array electromagnetic field-enhanced SERS device is as follows:
[0032] 1) A silicon nitride film 1 is grown on the upper surface of the silicon dioxide substrate 2, and a window is etched on the silicon dioxide substrate by wet etching, so that the film layer is suspended on the window, and the silicon dioxide The thickness of the substrate layer is 600 nanometers, and the thickness of the film is 1 nanometer;
[0033] 2) Coating a gold film 3 with a thickness of 300 nm on the window surface and the surface of the suspended film by metal sputtering;
[0034] 3) Using the focused ion beam method, the upper and lower layers of the array arrangement are respectively prepared on the suspended thin ...
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