Monolithic resonant accelerometer gyroscope structure

Abstract

The invention discloses a single-blade type resonance accelerometer gyroscope structure. The single-blade type resonance accelerometer gyroscope structure comprises a three-framework type full-decoupling gyroscope, and a resonance type accelerometer, wherein the resonance type accelerometer consists of two resonance beams; the horizontal side of the input end of the resonance type accelerometer is fixedly connected with an anchor point through a decoupling beam, and the vertical side of the input end of the resonance type accelerometer is connected with the gyroscope through a coupling beam; an inertial sensitive mass unit of the resonance type accelerometer consists of a gyroscope mass. The single-blade type resonance accelerometer gyroscope structure has the advantages that the angular movement vertical to the paper surface and the linear acceleration in the vertical direction can be effectively measured; the size is small, the structure is compact, the design is simple, and the accuracy is high.

Description

technical field [0001] The invention relates to the field of microelectronics, and belongs to an inertial sensor in a micro-electromechanical system (MEMS), in particular to a single-chip resonant accelerometer gyroscope structure. Background technique [0002] Silicon micro-accelerometers and gyroscopes are two very important miniature inertial sensors, and are also important components of miniature inertial navigation or guidance systems. Because the processing technology of silicon micro-inertial devices is compatible with microelectronic processing technology, it can be mass-produced, and has the advantages of small size, light weight, low cost, low power consumption, and high reliability. It is one of the hot development directions in the field of micro-mechanical electronic technology today First, it has broad prospects in both military and civilian fields. [0003] Simultaneous measurement of angular velocity and linear acceleration in a monolithic structure can grea...

AI Technical Summary

Problems solved by technology

[0004] The implementation method of the capacitive accelerometer gyroscope mainly has the following problems: 1. The responses generated by the angular velocity and the linear acceleration are reflected in the displacement of the mass block, and more complicated signal processing is required to separate the two kinds of inertial information; 2. The mass block At the same time, it has in-plane and out-of-plane motion, which requires high symmetry in structural processing; 3. The high-precision capacitance readout circuit is relatively complicated, which limits the accuracy of the accelerometer

However, in the current implementation of the resonant accelerometer gyroscope, the sensitive masses of each inertial measurement unit are independent of each other, which increases the overall volume and complexity of the structure, is not conducive to the miniaturization of the system, and increases the manufacturing cost

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